发明申请
- 专利标题： Method of growing electrical conductors
- 专利标题（中）： 生长电导体的方法
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申请号： US10910881申请日： 2004-08-03
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公开(公告)号： US20050208754A1公开(公告)日： 2005-09-22
- 发明人: Juhana Kostamo , Maarten Stokhof
- 申请人： Juhana Kostamo , Maarten Stokhof
- 主分类号： C23C16/40
- IPC分类号： C23C16/40 ; C23C16/56 ; H01L21/02 ; H01L21/28 ; H01L21/314 ; H01L21/768 ; H01L29/76
摘要：
A method for forming a conductive thin film includes depositing a metal oxide thin film on a substrate by an atomic layer deposition (ALD) process. The method further includes at least partially reducing the metal oxide thin film by exposing the metal oxide thin film to a gaseous inorganic reducing agent, thereby forming a metal layer. In preferred arrangements, the reducing agent comprises of thermal hydrogen (H2), hydrogen radicals (H*) and/or carbon monoxide (CO).
公开/授权文献
- US07067407B2 Method of growing electrical conductors 公开/授权日：2006-06-27
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