发明申请
- 专利标题: UNDER BUMP METALLIZATION LAYER TO ENABLE USE OF HIGH TIN CONTENT SOLDER BUMPS
- 专利标题(中): 低压金属化层可以使用高铁含量焊锡棒
-
申请号: US10812464申请日: 2004-03-29
-
公开(公告)号: US20050212133A1公开(公告)日: 2005-09-29
- 发明人: John Barnak , Gerald Feldewerth , Ming Fang , Kevin Lee , Tzuen-Luh Huang , Harry Liang , Seshu Sattiraju , Margherita Chang , Andrew Yeoh
- 申请人: John Barnak , Gerald Feldewerth , Ming Fang , Kevin Lee , Tzuen-Luh Huang , Harry Liang , Seshu Sattiraju , Margherita Chang , Andrew Yeoh
- 主分类号: H01L21/60
- IPC分类号: H01L21/60 ; H01L23/485 ; H01L21/00 ; H01L21/44 ; H01L21/48 ; H01L21/50 ; H01L23/48 ; H01L23/52 ; H01L29/40
摘要:
Apparatus and methods of fabricating an under bump metallization structure including an adhesion layer abutting a conductive pad, a molybdenum-containing barrier layer abutting the adhesion layer, a wetting layer abutting the molybdenum-containing barrier layer, and high tin content solder material abutting the wetting layer. The wetting layer may be substantially subsumed in the high content solder forming an intermetallic compound layer. The molybdenum-containing barrier layer prevents the movement of tin in the high tin content solder material from migrating to dielectric layers abutting the conductive pad and potentially causing delamination and/or attacking any underlying structures, particularly copper structures, which may be present.
公开/授权文献
信息查询
IPC分类: