发明申请
- 专利标题： Resonator, filter and fabrication of resonator
- 专利标题（中）： 谐振器的谐振器，滤波器和制造
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申请号： US11092979申请日： 2005-03-30
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公开(公告)号： US20050218754A1公开(公告)日： 2005-10-06
- 发明人: Tsuyoshi Yokoyama , Tokihiro Nishihara , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Masanori Ueda , Tsutomu Miyashita
- 申请人： Tsuyoshi Yokoyama , Tokihiro Nishihara , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Masanori Ueda , Tsutomu Miyashita
- 优先权： JP2004-101878 20040331
- 主分类号： H01L41/09
- IPC分类号： H01L41/09 ; H01L41/187 ; H01L41/22 ; H01L41/253 ; H03H3/02 ; H03H3/04 ; H03H9/02 ; H03H9/17 ; H03H9/56 ; H03H9/58 ; H03H9/70 ; H01L41/08
摘要：
A resonator includes a piezoelectric thin-film provided on a main surface of a substrate, a first electrode film provided on a first surface of the piezoelectric thin-film, a second electrode film provided on a second surface of the piezoelectric thin-film, a frequency adjustment film provided on one of the first and second electrode films, the frequency adjustment film comprising a film laminate including a first adjustment film provided on said one of the first and second electrode films, and a second adjustment film provided on the first adjustment film. The first adjustment film is used for Δf adjustment, and the second adjustment film is used for correcting frequency deviations generated in the filter manufacturing process. Thus, it is possible to accurately control the center frequency of the filter in which the multiple resonators are connected.
公开/授权文献
- US07498717B2 Resonator, filter and fabrication of resonator 公开/授权日：2009-03-03
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