发明申请
- 专利标题： Stage apparatus and exprosure apparatus
- 专利标题（中）： 舞台装置和展示装置
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申请号： US11094311申请日： 2005-03-31
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公开(公告)号： US20050219501A1公开(公告)日： 2005-10-06
- 发明人: Hitoshi Sato , Yoshikazu Miyajima , Yasuhito Sasaki
- 申请人： Hitoshi Sato , Yoshikazu Miyajima , Yasuhito Sasaki
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2004-110837 20040405
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G03B27/58 ; H01L21/027 ; H01L21/68 ; H02K9/19 ; H02K9/22 ; H02K41/02 ; H02K41/03
摘要：
A moving element to be propelled across a stator includes a coil unit, including coils, for generating a force to propel the moving unit, and a cooling unit for cooling the coil unit. A thermal conductive member, arranged between the cooling unit and the coil unit, transmits heat away from the coil unit. In addition, a housing unit houses the coil unit, the cooling unit and the thermal conductive member.
公开/授权文献
- US07301602B2 Stage apparatus and exposure apparatus 公开/授权日：2007-11-27
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