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公开(公告)号：US07301602B2
公开(公告)日：2007-11-27
申请号：US11094311
申请日：2005-03-31
CPC分类号： G03F7/70858 , G03B27/58 , G03F7/70716
摘要： A moving element to be propelled across a stator includes a coil unit, including coils, for generating a force to propel the moving unit, and a cooling unit for cooling the coil unit. A thermal conductive member, arranged between the cooling unit and the coil unit, transmits heat away from the coil unit. In addition, a housing unit houses the coil unit, the cooling unit and the thermal conductive member.
摘要翻译： 要跨越定子推进的移动元件包括用于产生推动移动单元的力的线圈单元，以及用于冷却线圈单元的冷却单元。 布置在冷却单元和线圈单元之间的导热构件将热量从线圈单元传递出去。 此外，壳体单元容纳线圈单元，冷却单元和导热构件。
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2.发明授权Plane motor device with surrounding member surrounding coil unit and with cooling channel provided within surrounding member 失效平面电机装置，围绕线圈单元的周围构件，并在周围构件内设有冷却通道公开(公告)号：US07408276B2
公开(公告)日：2008-08-05
申请号：US10832361
申请日：2004-04-27
IPC分类号： H02K41/00
CPC分类号： H02K41/03 , H02K1/32 , H02K5/20 , H02K16/00 , H02K2201/18
摘要： A plane motor device that includes a stator unit, a movable unit movable along a plane above the stator unit, first and second coil units at one or both of the movable unit and the stator unit, in which coil units a current flows for driving the coil unit, and an enclosure partitioned into a plurality of separate regions. The enclosure encloses the first and second coil units in two respective regions of the plurality of separate regions. Each of the two regions has a cooling channel through which cooling refrigerant flows separately from the cooling channel of the other region.
摘要翻译： 一种平面电动机装置，包括定子单元，可沿着定子单元上方的平面移动的可移动单元，在可移动单元和定子单元中的一个或两个处的第一和第二线圈单元，其中电流流过的线圈单元用于驱动 线圈单元和分隔成多个单独区域的外壳。 外壳将第一和第二线圈单元包围在多个分离区域的两个相应区域中。 两个区域中的每一个具有冷却通道，冷却制冷剂通过该冷却通道与另一区域的冷却通道分开地流动。
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公开(公告)号：US20050254036A1
公开(公告)日：2005-11-17
申请号：US11127292
申请日：2005-05-12
CPC分类号： G03F7/70766 , H01L21/682
摘要： A stage device includes a movable stage, a base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base as the stage moves. The base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the base. In addition, when the mass body is arranged in the base, the stage device can be more downsized.
摘要翻译： 舞台装置包括可移动舞台，支撑舞台的底座以及当舞台移动时移动以抵消作用在底座上的反作用力的质量体。 基座具有多个表面，并且台架和质量体由基座的不同表面支撑。 此外，当质量体布置在基座中时，能够使载物台装置更小型化。
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公开(公告)号：US20050219501A1
公开(公告)日：2005-10-06
申请号：US11094311
申请日：2005-03-31
CPC分类号： G03F7/70858 , G03B27/58 , G03F7/70716
摘要： A moving element to be propelled across a stator includes a coil unit, including coils, for generating a force to propel the moving unit, and a cooling unit for cooling the coil unit. A thermal conductive member, arranged between the cooling unit and the coil unit, transmits heat away from the coil unit. In addition, a housing unit houses the coil unit, the cooling unit and the thermal conductive member.
摘要翻译： 要跨越定子推进的移动元件包括用于产生推动移动单元的力的线圈单元，以及用于冷却线圈单元的冷却单元。 布置在冷却单元和线圈单元之间的导热构件将热量从线圈单元传递出去。 此外，壳体单元容纳线圈单元，冷却单元和导热构件。
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5.发明授权Stage apparatus, exposure system using the same, and device manufacturing method 失效舞台装置，使用其的曝光系统和装置制造方法公开(公告)号：US07391495B2
公开(公告)日：2008-06-24
申请号：US10820120
申请日：2004-04-08
CPC分类号： G03F7/70816 , G03F7/70716 , G03F7/70775 , G03F7/70875
摘要： A stage apparatus includes a base having a reference surface, a moving unit which moves along the reference surface, a static bearing which is provided in the moving unit and which supports the moving unit such that the moving unit can move along the reference surface, and a temperature controller which is provided in the moving unit and which controls the temperature of gas supplied to the static bearing. In the stage apparatus, air fluctuation in the measurement area of interferometers due to gas exhausted from the static bearing and/or distortion caused by heat transmitted to a retainer of a target is suppressed, and the stage positioning accuracy is thereby increased.
摘要翻译： 舞台装置包括具有参考面的基座，沿着基准面移动的移动单元，设置在移动单元中并支撑移动单元的静态轴承，使得移动单元可以沿着参考表面移动，以及 温度控制器设置在移动单元中并且控制供应给静态轴承的气体的温度。 在舞台装置中，抑制了由静电轴承排出的气体的干涉仪的测量区域的空气变动和/或传递到目标的保持器的热引起的变形，从而增加了台的定位精度。
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公开(公告)号：US07224432B2
公开(公告)日：2007-05-29
申请号：US11127292
申请日：2005-05-12
CPC分类号： G03F7/70766 , H01L21/682
摘要： A stage device including a movable stage, a plate-like base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base according to a movement of the movable stage. The plate-like base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the plate-like base.
摘要翻译： 一种舞台装置，包括可移动舞台，支撑舞台的板状底座以及根据活动舞台的运动而移动以消除作用在底座上的反作用力的质量体。 板状基部具有多个表面，台状体和主体由板状基体的不同表面支撑。
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公开(公告)号：US07321418B2
公开(公告)日：2008-01-22
申请号：US11249700
申请日：2005-10-13
CPC分类号： G03F7/70766
摘要： A stage apparatus includes a base, a stage movable on the base in first and second directions, a first member movable relative to the base in the first direction, and a second member movable relative to the base in the second direction. The first member is placed on the second member. With this arrangement, drive reaction-forces generated due to movement of the stage can be canceled by moving the first and second members, resulting in a smaller space needed for accommodating a canceling mechanism.
摘要翻译： 舞台装置包括基座，可在第一和第二方向上在基座上移动的台架，可在第一方向上相对于基座移动的第一构件，以及可相对于基座沿第二方向移动的第二构件。 第一个成员放置在第二个成员上。 通过这种布置，可以通过移动第一和第二构件来消除由于台的移动产生的驱动反作用力，导致容纳取消机构所需的较小的空间。
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8.发明授权公开(公告)号：US07312848B2
公开(公告)日：2007-12-25
申请号：US11378511
申请日：2006-03-17
CPC分类号： G03F7/70725 , G03F7/70875
摘要： This invention discloses an apparatus having a base and a movable body which is driven to move along the base. The apparatus includes a generator configured to generate a driving signal for the movable body, a temperature adjusting mechanism configured to adjust temperature of the base, and a controller configured to control a manipulated variable for the temperature control mechanism based on the generated driving signal.
摘要翻译： 本发明公开了一种具有基座和可移动体的装置，该移动体被驱动沿着底座移动。 该装置包括：发电机，其被配置为产生用于可移动体的驱动信号;温度调节机构，被配置为调节基座的温度;以及控制器，被配置为基于所产生的驱动信号来控制温度控制机构的操纵变量。
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9.发明申请公开(公告)号：US20060209287A1
公开(公告)日：2006-09-21
申请号：US11378511
申请日：2006-03-17
CPC分类号： G03F7/70725 , G03F7/70875
摘要： This invention discloses an apparatus having a base and a movable body which is driven to move along the base. The apparatus includes a generator configured to generate a driving signal for the movable body, a temperature adjusting mechanism configured to adjust temperature of the base, and a controller configured to control a manipulated variable for the temperature control mechanism based on the generated driving signal.
摘要翻译： 本发明公开了一种具有基座和可移动体的装置，该移动体被驱动沿着底座移动。 该装置包括：发电机，其被配置为产生用于可移动体的驱动信号;温度调节机构，被配置为调节基座的温度;以及控制器，被配置为基于所产生的驱动信号来控制温度控制机构的操纵变量。
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公开(公告)号：US20060082754A1
公开(公告)日：2006-04-20
申请号：US11249700
申请日：2005-10-13
IPC分类号： G03B27/58
CPC分类号： G03F7/70766
摘要： A stage apparatus includes a base, a stage movable on the base in first and second directions, a first member movable relative to the base in the first direction, and a second member movable relative to the base in the second direction. The first member is placed on the second member. With this arrangement, drive reaction-forces generated due to movement of the stage can be canceled by moving the first and second members, resulting in a smaller space needed for accommodating a canceling mechanism.
摘要翻译： 舞台装置包括基座，可在第一和第二方向上在基座上移动的台架，可在第一方向上相对于基座移动的第一构件，以及可相对于基座沿第二方向移动的第二构件。 第一个成员放置在第二个成员上。 通过这种布置，可以通过移动第一和第二构件来消除由于台的移动产生的驱动反作用力，导致容纳取消机构所需的较小的空间。
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