Invention Application
- Patent Title: CMP apparatus and load cup mechanism
- Patent Title (中): CMP装置和装载杯机构
-
Application No.: US10821758Application Date: 2004-04-09
-
Publication No.: US20050227595A1Publication Date: 2005-10-13
- Inventor: David Marquardt , Joe Koeth , James Crawford , James Ekberg , Antoni Jakubiec , Michael Smigel , John Stumpf
- Applicant: David Marquardt , Joe Koeth , James Crawford , James Ekberg , Antoni Jakubiec , Michael Smigel , John Stumpf
- Main IPC: B23Q3/18
- IPC: B23Q3/18 ; B23Q7/04 ; B24B5/00 ; B24B37/04

Abstract:
In accordance with one embodiment of the invention, a load cup mechanism is provided for loading and unloading apparatus such as a CMP apparatus. The load cup mechanism, configured to load a work piece into and to unload a work piece from the apparatus, comprises a load cup arm configured to pivot about an axis between a load position aligned with the apparatus and an off-load position. A work piece platform is coupled to an end of the load cup arm and a plurality of lift fingers and a plurality of guide fingers, configured to support and center a work piece, are spaced about the work piece platform. A plurality of guide posts are spaced apart about the periphery of the work piece platform and are configured to align the work piece platform, in the load position, to the processing apparatus.
Public/Granted literature
- US07354335B2 CMP apparatus and load cup mechanism Public/Granted day:2008-04-08
Information query
IPC分类: