公开(公告)号：US20050227595A1

公开(公告)日：2005-10-13

申请号：US10821758

申请日：2004-04-09

申请人： David Marquardt ,  Joe Koeth ,  James Crawford ,  James Ekberg ,  Antoni Jakubiec ,  Michael Smigel ,  John Stumpf

发明人： David Marquardt ,  Joe Koeth ,  James Crawford ,  James Ekberg ,  Antoni Jakubiec ,  Michael Smigel ,  John Stumpf

IPC分类号： B23Q3/18 ,  B23Q7/04 ,  B24B5/00 ,  B24B37/04

CPC分类号： B24B37/345 ,  B23Q3/18 ,  B23Q7/04 ,  Y10S414/136 ,  Y10S414/141

摘要： In accordance with one embodiment of the invention, a load cup mechanism is provided for loading and unloading apparatus such as a CMP apparatus. The load cup mechanism, configured to load a work piece into and to unload a work piece from the apparatus, comprises a load cup arm configured to pivot about an axis between a load position aligned with the apparatus and an off-load position. A work piece platform is coupled to an end of the load cup arm and a plurality of lift fingers and a plurality of guide fingers, configured to support and center a work piece, are spaced about the work piece platform. A plurality of guide posts are spaced apart about the periphery of the work piece platform and are configured to align the work piece platform, in the load position, to the processing apparatus.

摘要翻译： 根据本发明的一个实施例，提供了用于装载和卸载诸如CMP装置的装置的装载杯机构。 负载杯机构构造成将工件装载到装置中并从工具卸载工件，包括负载杯臂，其配置成围绕与该装置对准的负载位置和卸载位置之间的轴线枢转。 工件平台联接到负载杯臂的端部，并且构造成支撑和居中工件的多个提升指和多个引导指在工件平台周围间隔开。 多个引导柱围绕工件平台的周边间隔开，并且被构造成使处于装载位置的工件平台对准处理装置。