- 专利标题: Method of manufacturing a semiconductor memory device
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申请号: US11155174申请日: 2005-06-16
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公开(公告)号: US20050233505A1公开(公告)日: 2005-10-20
- 发明人: Jung-woo Seo , Tae-hyuk Ahn , Jeong-sic Jeon
- 申请人: Jung-woo Seo , Tae-hyuk Ahn , Jeong-sic Jeon
- 申请人地址: KR Suwon-Si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-Si
- 优先权: KR2003-70271 20031009
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L21/336 ; H01L21/768 ; H01L21/8242 ; H01L27/108
摘要:
Manufacturing a semiconductor memory by first forming a first insulating layer covering a conductive pad. Next forming and pattering a bit line conductive layer and a second insulating layer to expose a part of the first insulating layer. A third insulating layer covering the exposed surfaces of the first insulating layer is formed. Exposing an upper surface of the bit line conductive layer pattern and an upper surface of the third insulating layer. Removing part of the third insulating layer and first insulating layer to expose the conductive pad. Forming a spacer on the side walls of the bit line conductive layer pattern and the first insulating layer. An insulating layer pattern and a second spacer layer are respectively formed on the bit line conductive layer pattern and on a side wall of the first spacer and a conductive plug, which is in contact with the conductive pad is formed.
公开/授权文献
- US07312121B2 Method of manufacturing a semiconductor memory device 公开/授权日:2007-12-25
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