Invention Application
- Patent Title: Semiconductor light-emitting device and a method of manufacture thereof
- Patent Title (中): 半导体发光器件及其制造方法
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Application No.: US11030791Application Date: 2005-01-07
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Publication No.: US20050249253A1Publication Date: 2005-11-10
- Inventor: Katherine Johnson , Stewart Hooper , Valerie Bousquet , Matthias Kauer , Jonathan Heffernan
- Applicant: Katherine Johnson , Stewart Hooper , Valerie Bousquet , Matthias Kauer , Jonathan Heffernan
- Priority: GB0400364.6 20040109
- Main IPC: H01S5/042
- IPC: H01S5/042 ; H01L21/00 ; H01L33/00 ; H01S5/00 ; H01S5/02 ; H01S5/22 ; H01S5/227 ; H01S5/323

Abstract:
A semiconductor light-emitting device and a method of manufacture thereof A method of manufacturing a semiconductor light-emitting device comprises selectively etching a semiconductor layer structure (16) fabricated in a nitride materials system and including an aluminium-containing cladding region or an aluminium-containing optical guiding region (5). The etching step forms a mesa (17), and also exposes one or more portions of the aluminium-containing cladding region or the aluminium-containing optical guiding region (5). The or each exposed portion of the aluminium-containing cladding region or the aluminium-containing optical guiding region (5) Is then oxidised to form a current blocking layer (18) laterally adjacent to and extending laterally from the mesa. When an electrically conductive contact layer (11) is deposited, the current blocking layer (18) will prevent the contact layer (11) from making direct contact with the buffer layer (3).
Public/Granted literature
- US07569862B2 Semiconductor light-emitting device and a method of manufacture thereof Public/Granted day:2009-08-04
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