发明申请
US20050264137A1 Piezoelectric thin-film resonator and filter and fabricating method
有权
压电薄膜谐振器和滤波器及其制造方法
- 专利标题： Piezoelectric thin-film resonator and filter and fabricating method
- 专利标题（中）： 压电薄膜谐振器和滤波器及其制造方法
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申请号： US11138893申请日： 2005-05-27
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公开(公告)号： US20050264137A1公开(公告)日： 2005-12-01
- 发明人: Shinji Taniguchi , Tokihiro Nishihara , Takeshi Sakashita , Tsuyoshi Yokoyama , Masafumi Iwaki , Masanori Ueda , Tsutomu Miyashita
- 申请人： Shinji Taniguchi , Tokihiro Nishihara , Takeshi Sakashita , Tsuyoshi Yokoyama , Masafumi Iwaki , Masanori Ueda , Tsutomu Miyashita
- 优先权： JP2004-162646 20040531
- 主分类号： H01L41/08
- IPC分类号： H01L41/08 ; H03H3/02 ; H03H9/17 ; H03H9/56 ; H03H9/58
摘要：
A piezoelectric thin-film resonator includes a device substrate and a laminated body provided on the device substrate and composed of a lower electrode, an upper electrode and a piezoelectric film sandwiched between the lower and upper electrodes. The laminated body has a membrane portion in which the upper and lower electrodes overlap with each other through the piezoelectric film, and a gap has a dome shape being formed between the device substrate and the lower electrode and located below the membrane portion.