发明申请
- 专利标题: Magnetic recording medium, method of manufacturing the same, and magnetic recording/reproduction apparatus
- 专利标题(中): 磁记录介质及其制造方法以及磁记录/再现装置
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申请号: US11135258申请日: 2005-05-24
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公开(公告)号: US20050282038A1公开(公告)日: 2005-12-22
- 发明人: Takayuki Yamamoto , Masatoshi Sakurai , Yoshiyuki Kamata
- 申请人: Takayuki Yamamoto , Masatoshi Sakurai , Yoshiyuki Kamata
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2004-183933 20040622
- 主分类号: B05D3/00
- IPC分类号: B05D3/00 ; G11B5/00 ; G11B5/012 ; G11B5/147 ; G11B5/66 ; G11B5/72 ; G11B5/82 ; G11B5/855
摘要:
A magnetic recording medium is obtained by easily patterning a magnetic recording layer without deteriorating its electromagnetic conversion characteristics, by forming a silicon-based protective film between the magnetic recording layer and a photoresist, and performing dry etching and oxygen plasma processing.