发明申请
- 专利标题: Imprint apparatus and method for imprinting
- 专利标题(中): 压印设备和印刷方法
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申请号: US10952743申请日: 2004-09-30
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公开(公告)号: US20050284320A1公开(公告)日: 2005-12-29
- 发明人: Masatoshi Sakuarai , Akira Kikitsu , Naoko Kihara
- 申请人: Masatoshi Sakuarai , Akira Kikitsu , Naoko Kihara
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JPP2003-342067 20030930
- 主分类号: G11B5/855
- IPC分类号: G11B5/855 ; B41G7/00 ; G03F7/00
摘要:
An imprint apparatus configured such that it can press a laminate structure in which a magnetic film and a resist film are sequentially laminated on a substrate. The imprint apparatus includes a first press plate configured to mount the laminate structure, a second press plate adapted for sandwiching the laminate structure, a stamper placed on a surface of the second press plate, and has projections and recesses configured to be transferred onto the resist film, and a light source configured to dispose on the same plane as the laminate structure, and is oriented so that the light source can shine the resist film.
公开/授权文献
- US07343857B2 Imprint apparatus and method for imprinting 公开/授权日:2008-03-18
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