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46 条记录 (耗时 0.02 秒)

    Imprint apparatus and method for imprinting
    1.
    发明申请
    Imprint apparatus and method for imprinting 有权
    压印设备和印刷方法

    公开(公告)号：US20050284320A1

    公开(公告)日：2005-12-29

    申请号：US10952743

    申请日：2004-09-30

    申请人： Masatoshi Sakuarai ,  Akira Kikitsu ,  Naoko Kihara

    发明人： Masatoshi Sakuarai ,  Akira Kikitsu ,  Naoko Kihara

    IPC分类号： G11B5/855 ,  B41G7/00 ,  G03F7/00

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/855 ,  Y10S977/877 ,  Y10S977/888

    摘要： An imprint apparatus configured such that it can press a laminate structure in which a magnetic film and a resist film are sequentially laminated on a substrate. The imprint apparatus includes a first press plate configured to mount the laminate structure, a second press plate adapted for sandwiching the laminate structure, a stamper placed on a surface of the second press plate, and has projections and recesses configured to be transferred onto the resist film, and a light source configured to dispose on the same plane as the laminate structure, and is oriented so that the light source can shine the resist film.

    摘要翻译： 一种压印装置，其构造成能够将其中磁性膜和抗蚀剂膜依次层压在基板上的层叠结构。 压印装置包括构造成安装层叠结构的第一压板，适于夹持层叠结构的第二压板，设置在第二压板的表面上的压模，并且具有被配置为转印到抗蚀剂上的突起和凹陷 膜，以及配置为与层叠结构在同一平面上的光源，并且被定向成使得光源能够照射抗蚀剂膜。

    Imprint apparatus and method for imprinting
    2.
    发明授权
    Imprint apparatus and method for imprinting 有权
    压印设备和印刷方法

    公开(公告)号：US07343857B2

    公开(公告)日：2008-03-18

    申请号：US10952743

    申请日：2004-09-30

    申请人： Masatoshi Sakuarai ,  Akira Kikitsu ,  Naoko Kihara

    发明人： Masatoshi Sakuarai ,  Akira Kikitsu ,  Naoko Kihara

    IPC分类号： B41F33/00

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/855 ,  Y10S977/877 ,  Y10S977/888

    摘要： An imprint apparatus configured such that it can press a laminate structure in which a magnetic film and a resist film are sequentially laminated on a substrate. The imprint apparatus includes a first press plate configured to mount the laminate structure, a second press plate adapted for sandwiching the laminate structure, a stamper placed on a surface of the second press plate, and has projections and recesses configured to be transferred onto the resist film, and a light source configured to dispose on the same plane as the laminate structure, and is oriented so that the light source can shine the resist film.

    摘要翻译： 一种压印装置，其构造成能够将其中磁性膜和抗蚀剂膜依次层压在基板上的层叠结构。 压印装置包括构造成安装层叠结构的第一压板，适于夹持层叠结构的第二压板，设置在第二压板的表面上的压模，并且具有被配置为转印到抗蚀剂上的突起和凹陷 膜，以及配置为与层叠结构在同一平面上的光源，并且被定向成使得光源能够照射抗蚀剂膜。

    Method of forming fine pattern
    3.
    发明申请
    Method of forming fine pattern 审中-公开
    形成精细图案的方法

    公开(公告)号：US20120067843A1

    公开(公告)日：2012-03-22

    申请号：US13064301

    申请日：2011-03-16

    申请人： Akira Watanabe ,  Kaori Kimura ,  Yousuke Isowaki ,  Yoshiyuki Kamata ,  Naoko Kihara ,  Akira Kikitsu

    发明人： Akira Watanabe ,  Kaori Kimura ,  Yousuke Isowaki ,  Yoshiyuki Kamata ,  Naoko Kihara ,  Akira Kikitsu

    IPC分类号： C23F1/02

    CPC分类号： H01L21/3086 ,  B82Y10/00 ,  G03F7/0002 ,  G03F7/165 ,  G03F7/168 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/3081

    摘要： A method of forming a fine pattern according to an embodiment includes: forming a hard mask on a substrate; forming a mask reinforcing member on the hard mask; forming a di-block copolymer layer on the mask reinforcing member, the di-block copolymer layer comprising a sea-island structure; forming a pattern comprising a concave-convex structure in the di-block copolymer layer, with island portions of the sea-island structure being convex portions; and transferring the pattern onto the hard mask by performing etching on the mask reinforcing member and the hard mask, with a mask being the pattern formed in the di-block copolymer layer. The mask reinforcing member is comprised of a material having an etching speed that is higher than an etching speed for the hard mask and is lower than an etching speed for sea portions of the sea-island structure of the di-block copolymer layer.

    摘要翻译： 根据实施例的形成精细图案的方法包括：在基底上形成硬掩模; 在所述硬掩模上形成掩模加强部件; 在掩模加强部件上形成二嵌段共聚物层，二嵌段共聚物层包含海岛结构体; 在所述二嵌段共聚物层中形成包括凹凸结构的图案，所述海岛结构的岛部是凸部; 并通过在掩模增强部件和硬掩模上进行蚀刻将图案转印到硬掩模上，其中掩模是在二嵌段共聚物层中形成的图案。 掩模加强部件由蚀刻速度高于硬掩模的蚀刻速度的材料构成，并且低于二嵌段共聚物层的海岛结构的海水部分的蚀刻速度。

    Substrate for magnetic recording media, magnetic recording media and magnetic recording apparatus
    4.
    发明授权
    Substrate for magnetic recording media, magnetic recording media and magnetic recording apparatus 有权
    磁记录介质基板，磁记录介质和磁记录装置

    公开(公告)号：US07635529B2

    公开(公告)日：2009-12-22

    申请号：US11475862

    申请日：2006-06-28

    申请人： Katsuyuki Naito ,  Masatoshi Sakurai ,  Akira Kikitsu ,  Yoshiyuki Kamata ,  Naoko Kihara ,  Masahiro Oka

    发明人： Katsuyuki Naito ,  Masatoshi Sakurai ,  Akira Kikitsu ,  Yoshiyuki Kamata ,  Naoko Kihara ,  Masahiro Oka

    IPC分类号： G11B5/71 ,  G11B5/82

    CPC分类号： G11B5/7315

    摘要： According to one embodiment, a substrate for a magnetic recording media has circumferential protrusions corresponding to recording tracks and circumferential recesses corresponding to grooves between the recording tracks, in which the substrate satisfying at least one of conditions of (a) a surface of the recess has a surface energy smaller than that of the protrusion, (b) the surface of the recess is modified with a thermally decomposable or deformable substance, (c) the surface of the recess has surface roughness smaller than that of the protrusion, (d) crystal orientation is more disturbed on the surface of the recess than on the protrusion, (e) the surface of the recess is modified with a substance that causes reaction with a magnetic material or that diffuses into the magnetic material, and (f) the surface of the recess is modified with a substance soluble in a solvent or with a deformable substance.

    摘要翻译： 根据一个实施例，用于磁记录介质的基底具有对应于记录轨迹的周向突起和对应于记录轨道之间的凹槽的周向凹部，其中满足以下条件中的至少一个的基底：（a）凹部的表面具有 表面能小于突起的表面能，（b）凹部的表面用可热分解或可变形的物质进行改性，（c）凹陷表面的表面粗糙度小于突起的表面粗糙度，（d）晶体 在凹部的表面上比在突起上的取向更加干扰，（e）凹部的表面用引起与磁性材料反应或扩散到磁性材料中的物质进行改性，和（f） 该凹部用可溶于溶剂或可变形物质的物质进行改性。

    Substrate for magnetic recording media, magnetic recording media and magnetic recording apparatus
    5.
    发明申请
    Substrate for magnetic recording media, magnetic recording media and magnetic recording apparatus 有权
    磁记录介质基板，磁记录介质和磁记录装置

    公开(公告)号：US20070003798A1

    公开(公告)日：2007-01-04

    申请号：US11475862

    申请日：2006-06-28

    申请人： Katsuyuki Naito ,  Masatoshi Sakurai ,  Akira Kikitsu ,  Yoshiyuki Kamata ,  Naoko Kihara ,  Masahiro Oka

    发明人： Katsuyuki Naito ,  Masatoshi Sakurai ,  Akira Kikitsu ,  Yoshiyuki Kamata ,  Naoko Kihara ,  Masahiro Oka

    IPC分类号： G11B5/706

    CPC分类号： G11B5/7315

    摘要： According to one embodiment, a substrate for a magnetic recording media has circumferential protrusions corresponding to recording tracks and circumferential recesses corresponding to grooves between the recording tracks, in which the substrate satisfying at least one of conditions of (a) a surface of the recess has a surface energy smaller than that of the protrusion, (b) the surface of the recess is modified with a thermally decomposable or deformable substance, (c) the surface of the recess has surface roughness smaller than that of the protrusion, (d) crystal orientation is more disturbed on the surface of the recess than on the protrusion, (e) the surface of the recess is modified with a substance that causes reaction with a magnetic material or that diffuses into the magnetic material, and (f) the surface of the recess is modified with a substance soluble in a solvent or with a deformable substance.

    摘要翻译： 根据一个实施例，用于磁记录介质的基底具有对应于记录轨迹的周向突起和对应于记录轨道之间的凹槽的周向凹部，其中满足以下条件中的至少一个的基底：（a）凹部的表面具有 表面能小于突起的表面能，（b）凹部的表面用可热分解或可变形的物质进行改性，（c）凹陷表面的表面粗糙度小于突起的表面粗糙度，（d）晶体 在凹部的表面上比在突起上的取向更加干扰，（e）凹部的表面用引起与磁性材料反应或扩散到磁性材料中的物质进行改性，和（f） 该凹部用可溶于溶剂或可变形物质的物质进行改性。

    Method for pattern formation
    8.
    发明授权
    Method for pattern formation 有权
    图案形成方法

    公开(公告)号：US07931819B2

    公开(公告)日：2011-04-26

    申请号：US11727158

    申请日：2007-03-23

    申请人： Naoko Kihara ,  Hiroyuki Hieda

    发明人： Naoko Kihara ,  Hiroyuki Hieda

    IPC分类号： H01L21/302

    CPC分类号： H01L21/3086 ,  B82Y10/00 ,  Y10S438/942

    摘要： There is provided a method for pattern formation, including a step of coating a composition comprising a block copolymer, a silicon compound, and a solvent for dissolving these components onto an object to form a layer of the composition on the object, a step of subjecting the layer of the composition to self-organization of the block copolymer to cause phase separation into a first phase, in which the silicon compound is localized, having higher etching resistance by heat treatment or/and oxygen plasma treatment, and a second phase comprising a polymer phase and having lower etching resistance by heat treatment or/and oxygen plasma treatment, and thereby forming a pattern layer with a fine pattern, and a step of etching the object using as a mask the thus formed pattern layer.

    摘要翻译： 提供了一种形成图案的方法，其包括将包含嵌段共聚物，硅化合物和溶剂的组合物涂布到物体上以形成该物质层的步骤， 所述组合物层自组织所述嵌段共聚物以引起相分离成其中所述硅化合物定位的第一相，通过热处理或/和氧等离子体处理具有较高的耐蚀刻性，以及第二相，其包含 聚合物相，并且通过热处理或/和氧等离子体处理具有较低的耐腐蚀性，从而形成具有精细图案的图案层，以及使用由此形成的图案层作为掩模蚀刻该物体的步骤。

    Magnetic recording media
    9.
    发明申请
    Magnetic recording media 有权
    磁记录媒体

    公开(公告)号：US20060257694A1

    公开(公告)日：2006-11-16

    申请号：US11434519

    申请日：2006-05-16

    申请人： Hiroyuki Hieda ,  Naoko Kihara ,  Yoshitaka Yanagita

    发明人： Hiroyuki Hieda ,  Naoko Kihara ,  Yoshitaka Yanagita

    IPC分类号： G11B5/64

    CPC分类号： G11B5/855

    摘要： A magnetic recording media has recording cells formed of two-dimensionally arrayed magnetic material, a nonmagnetic layer surrounding the recording cells, an adhesive film formed on each of the recording cells, and a lubricant directly adhered to the adhesive film.

    摘要翻译： 磁记录介质具有由二维排列的磁性材料形成的记录单元，围绕记录单元的非磁性层，形成在每个记录单元上的粘合膜，以及直接附着在粘合膜上的润滑剂。