发明申请
US20050285109A1 Novel conductive elements for thin film transistors used in a flat panel display
审中-公开
用于平板显示器的薄膜晶体管的新型导电元件
- 专利标题： Novel conductive elements for thin film transistors used in a flat panel display
- 专利标题（中）： 用于平板显示器的薄膜晶体管的新型导电元件
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申请号： US11206901申请日： 2005-08-19
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公开(公告)号： US20050285109A1公开(公告)日： 2005-12-29
- 发明人: Tae-Sung Kim
- 申请人： Tae-Sung Kim
- 优先权： KR2003-15356 20030312; KR2003-63583 20030915
- 主分类号： G02F1/1368
- IPC分类号： G02F1/1368 ; H01L21/28 ; H01L27/12 ; H01L29/417 ; H01L29/423 ; H01L29/45 ; H01L29/49 ; H01L29/786 ; H01L51/50 ; H01L29/04
摘要：
Provided is a structure for conductive members in a TFT display. The structure is aluminum based and is heat treated. When heat treated, no hillocks are formed because of the presence of a titanium layer. Furthermore, TiAl3 is not formed because of the presence of a TiN diffusion layer between the aluminum and the Ti layers. This novel structure has a low resistivity and is therefore suited for large displays that use thin film transistors to drive the pixels.
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