发明申请
- 专利标题: Micromirror device
- 专利标题(中): 微镜装置
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申请号: US11256035申请日: 2005-10-21
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公开(公告)号: US20060033977A1公开(公告)日: 2006-02-16
- 发明人: Satyadev Patel , Andrew Huibers
- 申请人: Satyadev Patel , Andrew Huibers
- 主分类号: G02F1/03
- IPC分类号: G02F1/03 ; G02F1/07
摘要:
A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during operation, wherein the OFF state is a state wherein the mirror plate is not parallel to the substrate on which the mirror plate is formed. The micromirror device may have an ON state stopper for limiting the rotation of the mirror plate at the ON state angle, but does not have an OFF state angle. The non-zero OFF state is achieved by attaching the mirror plate to a deformable hinge held by a hinge support that is curved at the natural resting state.
公开/授权文献
- US07411717B2 Micromirror device 公开/授权日:2008-08-12
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