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公开(公告)号：US07697193B2
公开(公告)日：2010-04-13
申请号：US11853812
申请日：2007-09-11
Applicant: Andrew Huibers , Satyadev Patel
Inventor： Andrew Huibers , Satyadev Patel
IPC: G02B26/00
CPC classification number: G02B26/0841
Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.
Abstract translation: 在显示系统中使用的空间光调制器的微镜阵列的微镜包括附接到由在基板上形成的两个支柱支撑的铰链的镜板。 此外，当从顶部观察时，镜板可操作以沿着平行于但偏离镜板的对角线的旋转轴线旋转。 连接两个柱的假想线不平行于镜板的任一对角线。
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公开(公告)号：US20090190825A1
公开(公告)日：2009-07-30
申请号：US12360083
申请日：2009-01-26
Applicant: Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
Inventor： Igor Volfman , Andrew Huibers , Satyadev Patel , Peter Richards , Leonid Frenkel , Jim Dunphy , Regis Grasser , Greg Schaadt
Abstract: The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.
Abstract translation: 本发明提供一种用于通过测量各个微镜对电场驱动力的机电响应来评估微镜阵列器件的产品质量和性能的方法和装置。 根据本发明的微反射镜的机电响应以与操作状态相关联的旋转角度进行描述，例如当微镜阵列器件在二进制编码器中操作时，ON和OFF状态的ON和OFF状态角， 状态模式以及各个微镜对驱动场的响应速度（即，微镜器件从一个状态转移到另一个状态所需的时间间隔）。
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公开(公告)号：US07557932B2
公开(公告)日：2009-07-07
申请号：US11110338
申请日：2005-04-19
Applicant: Jonathan Doan , Regis Grasser , Satyadev Patel , Andrew Huibers , Igor Volfman
Inventor： Jonathan Doan , Regis Grasser , Satyadev Patel , Andrew Huibers , Igor Volfman
IPC: G01B9/02
CPC classification number: G02B26/001 , G02B26/0841
Abstract: The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected with an optical resonance mapping mechanism on a wafer-level.
Abstract translation: 本发明提供一种用于使用谐振技术来评估具有可变形和可偏转构件的微机电装置的质量的方法和装置。 具体地说，利用晶片级上的光学共振映射机构来检查以可变形和可偏转元件的均匀性为特征的产品质量。
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4.发明授权Mirror-based projection system with a programmable control unit for controlling a spatial light modulator 有权基于镜像的投影系统，具有用于控制空间光调制器的可编程控制单元公开(公告)号：US07498648B2
公开(公告)日：2009-03-03
申请号：US11332594
申请日：2006-01-12
Applicant: Peter Richards , Andrew Huibers , Satyadev Patel
Inventor： Peter Richards , Andrew Huibers , Satyadev Patel
IPC: G09G3/34
CPC classification number: B82Y30/00 , G02B26/0841 , H04N5/7458
Abstract: A projection system is disclosed herein. The projection system employs a spatial light modulator comprising an array of individually addressable pixels for modulating the incident light based on image data. The modulated light is projected on a screen for viewing.
Abstract translation: 本文公开了一种投影系统。 投影系统采用包括可单独寻址的像素阵列的空间光调制器，用于基于图像数据调制入射光。 调制光投影在屏幕上以供观看。
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公开(公告)号：US07362494B2
公开(公告)日：2008-04-22
申请号：US11734442
申请日：2007-04-12
Applicant: Andrew Huibers , Hongqin Shi , James C. Dunphy , Satyadev Patel
Inventor： Andrew Huibers , Hongqin Shi , James C. Dunphy , Satyadev Patel
IPC: G02B26/00
CPC classification number: G02B26/0841 , H01L27/14625 , H01L31/02327
Abstract: A method for making a micromirror device comprises is disclosed herein.
Abstract translation: 本文公开了一种制造微反射镜装置的方法。
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Patent Agency Ranking
公开(公告)号：US20080049290A1
公开(公告)日：2008-02-28
申请号：US11853812
申请日：2007-09-11
Applicant: Andrew Huibers , Satyadev Patel
Inventor： Andrew Huibers , Satyadev Patel
IPC: G02B26/00
CPC classification number: G02B26/0841
Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.
Abstract translation: 在显示系统中使用的空间光调制器的微镜阵列的微镜包括附接到由在基板上形成的两个支柱支撑的铰链的镜板。 此外，当从顶部观察时，镜板可操作以沿着平行于但偏离镜板的对角线的旋转轴线旋转。 连接两个柱的假想线不平行于镜板的任一对角线。
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公开(公告)号：US07268934B2
公开(公告)日：2007-09-11
申请号：US11327697
申请日：2006-01-05
Applicant: Andrew Huibers , Satyadev Patel
Inventor： Andrew Huibers , Satyadev Patel
IPC: G02B26/00
CPC classification number: G02B26/0841
Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.
Abstract translation: 在显示系统中使用的空间光调制器的微镜阵列的微镜包括附接到由在基板上形成的两个支柱支撑的铰链的镜板。 此外，当从顶部观察时，镜板可操作以沿着平行于但偏离镜板的对角线的旋转轴线旋转。 连接两个柱的假想线不平行于镜板的任一对角线。
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公开(公告)号：US20060245032A1
公开(公告)日：2006-11-02
申请号：US11110338
申请日：2005-04-19
Applicant: Jonathan Doan , Regis Grasser , Satyadev Patel , Andrew Huibers , Igor Volfman
Inventor： Jonathan Doan , Regis Grasser , Satyadev Patel , Andrew Huibers , Igor Volfman
IPC: G02B26/00
CPC classification number: G02B26/001 , G02B26/0841
Abstract: The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected with an optical resonance mapping mechanism on a wafer-level.
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公开(公告)号：US07119944B2
公开(公告)日：2006-10-10
申请号：US11056727
申请日：2005-02-11
Applicant: Satyadev Patel , Andrew Huibers , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
Inventor： Satyadev Patel , Andrew Huibers , Jonathan Doan , James Dunphy , Dmitri Simonian , Hongqin Shi , Jianglong Zhang
IPC: G02B26/00
CPC classification number: G02B26/0841 , G02B27/1026 , Y10S359/904
Abstract: Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
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公开(公告)号：US07075702B2
公开(公告)日：2006-07-11
申请号：US11216594
申请日：2005-08-30
Applicant: Andrew Huibers , Satyadev Patel
Inventor： Andrew Huibers , Satyadev Patel
CPC classification number: G02B26/0841
Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.
Abstract translation: 在显示系统中使用的空间光调制器的微镜阵列的微镜包括附接到由在基板上形成的两个支柱支撑的铰链的镜板。 此外，当从顶部观察时，镜板可操作以沿着平行于但偏离镜板的对角线的旋转轴线旋转。 连接两个柱的假想线不平行于镜板的任一对角线。
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