发明申请
- 专利标题: System and method for accurate negative bias temperature instability characterization
- 专利标题(中): 准确的负偏压温度不稳定性表征的系统和方法
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申请号: US10935375申请日: 2004-09-07
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公开(公告)号: US20060049842A1公开(公告)日: 2006-03-09
- 发明人: Anand Krishnan , Srikanth Krishnan , Vijay Reddy , Cathy Chancellor
- 申请人: Anand Krishnan , Srikanth Krishnan , Vijay Reddy , Cathy Chancellor
- 主分类号: G01R31/26
- IPC分类号: G01R31/26
摘要:
Methods and systems are provided for characterizing the negative temperature bias instability of a transistor. A bias voltage is maintained at a drain terminal of the transistor during a test period. A stress voltage is maintained at a gate terminal of the transistor during the test period, such that the stress voltage is applied concurrently with the bias voltage. At least one characteristic of the transistor is measured at periodic intervals during the stress period to determine a degradation of the at least one characteristic caused by the stress voltage until a termination event occurs.
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