发明申请
US20060097644A1 Relative pressure control system and relative flow control system
有权
相对压力控制系统和相对流量控制系统
- 专利标题: Relative pressure control system and relative flow control system
- 专利标题(中): 相对压力控制系统和相对流量控制系统
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申请号: US11295649申请日: 2005-12-07
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公开(公告)号: US20060097644A1公开(公告)日: 2006-05-11
- 发明人: Tetsujiro Kono , Hiroki Doi , Minoru Ito , Hideki Nagaoka , Keiki Ito , Hiroki Endo , Tsuyoshi Shimazu , Jun Hirose , Osamu Katsumata , Kazuyuki Miura , Takashi Kitazawa
- 申请人: Tetsujiro Kono , Hiroki Doi , Minoru Ito , Hideki Nagaoka , Keiki Ito , Hiroki Endo , Tsuyoshi Shimazu , Jun Hirose , Osamu Katsumata , Kazuyuki Miura , Takashi Kitazawa
- 申请人地址: JP Komaki-shi JP Tokyo
- 专利权人: CKD CORPORATION,TOKYO ELECTRON LIMITED
- 当前专利权人: CKD CORPORATION,TOKYO ELECTRON LIMITED
- 当前专利权人地址: JP Komaki-shi JP Tokyo
- 优先权: JP2003-163948 20030609
- 主分类号: H01J7/24
- IPC分类号: H01J7/24
摘要:
Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard-interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened. In the configuration, an opening of a specified one of the plurality of air operated valves is regulated, the operation gas is output at a predetermined division ratio.
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