公开(公告)号：US20060097644A1

公开(公告)日：2006-05-11

申请号：US11295649

申请日：2005-12-07

申请人： Tetsujiro Kono ,  Hiroki Doi ,  Minoru Ito ,  Hideki Nagaoka ,  Keiki Ito ,  Hiroki Endo ,  Tsuyoshi Shimazu ,  Jun Hirose ,  Osamu Katsumata ,  Kazuyuki Miura ,  Takashi Kitazawa

发明人： Tetsujiro Kono ,  Hiroki Doi ,  Minoru Ito ,  Hideki Nagaoka ,  Keiki Ito ,  Hiroki Endo ,  Tsuyoshi Shimazu ,  Jun Hirose ,  Osamu Katsumata ,  Kazuyuki Miura ,  Takashi Kitazawa

IPC分类号： H01J7/24

CPC分类号： G05D16/206 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/87877

摘要： Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard-interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened. In the configuration, an opening of a specified one of the plurality of air operated valves is regulated, the operation gas is output at a predetermined division ratio.

摘要翻译： 提供一种相对压力控制系统具有简单的结构，但是能够精确地调节操作气体的分配比，并且在紧急情况下同时可以从操作气体管道可靠地排出操作气体。 该系统包括多个常开型气动阀，其连接到供给操作气体的操作气体管道; 压力传感器串联连接到相应的气动阀并且检测各个气动阀的输出压力; 控制器，其根据压力传感器检测到的压力来控制各个气动阀的操作压力; 以及将所述多个气动阀彼此关联使得所述多个气动阀中的至少一个正常打开的硬联锁电磁阀。 在这种构造中，调节多个气动阀中的指定的一个的开度，以预定的分配比率输出操作气体。

公开(公告)号：US07353841B2

公开(公告)日：2008-04-08

申请号：US11295649

申请日：2005-12-07

申请人： Tetsujiro Kono ,  Hiroki Doi ,  Minoru Ito ,  Hideki Nagaoka ,  Keiki Ito ,  Hiroki Endo ,  Tsuyoshi Shimazu ,  Jun Hirose ,  Osamu Katsumata ,  Kazuyuki Miura ,  Takashi Kitazawa

发明人： Tetsujiro Kono ,  Hiroki Doi ,  Minoru Ito ,  Hideki Nagaoka ,  Keiki Ito ,  Hiroki Endo ,  Tsuyoshi Shimazu ,  Jun Hirose ,  Osamu Katsumata ,  Kazuyuki Miura ,  Takashi Kitazawa

IPC分类号： G05D11/13 ,  G05D16/20

CPC分类号： G05D16/206 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/87877

摘要： Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened. In the configuration, an opening of a specified one of the plurality of air operated valves is regulated, the operation gas is output at a predetermined division ratio.

摘要翻译： 提供一种相对压力控制系统具有简单的结构，但是能够精确地调节操作气体的分配比，并且在紧急情况下同时可以从操作气体管道可靠地排出操作气体。 该系统包括多个常开型气动阀，其连接到供给操作气体的操作气体管道; 压力传感器串联连接到相应的气动阀并且检测各个气动阀的输出压力; 控制器，其根据压力传感器检测到的压力来控制各个气动阀的操作压力; 以及将所述多个气动阀彼此关联使得所述多个气动阀中的至少一个通常打开的硬联锁电磁阀。 在这种构造中，调节多个气动阀中的指定的一个的开度，以预定的分配比率输出操作气体。

公开(公告)号：US07481240B2

公开(公告)日：2009-01-27

申请号：US10863205

申请日：2004-06-09

申请人： Hideki Nagaoka ,  Hiroshi Koizumi ,  Jun Ooyabu ,  Tsuyoshi Shimazu ,  Hiroki Endo ,  Keiki Ito ,  Daisuke Hayashi

发明人： Hideki Nagaoka ,  Hiroshi Koizumi ,  Jun Ooyabu ,  Tsuyoshi Shimazu ,  Hiroki Endo ,  Keiki Ito ,  Daisuke Hayashi

IPC分类号： G05D11/13 ,  G05D16/20

CPC分类号： H01L21/67253 ,  H01L21/67017 ,  Y10T137/2499 ,  Y10T137/7722 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8733

摘要： A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.

摘要翻译： 分压控制系统45包括从操作气体供给管44分支并且可变地控制操作气体的压力传感器3和分别连接到每个阀2的压力传感器3并且检测操作气体的压力的两个阀2， 以及控制器25，其基于压力传感器3的检测结果按比例地控制阀2的操作，从而相对控制两个阀的压力P1和P2。 利用这种结构，可以减少操作气体的浪费，并且提高相对于设定变化等的响应性。

公开(公告)号：US20050029369A1

公开(公告)日：2005-02-10

申请号：US10863205

申请日：2004-06-09

申请人： Hideki Nagaoka ,  Hiroshi Koizumi ,  Jun Ooyabu ,  Tsuyoshi Shimazu ,  Hiroki Endo ,  Keiki Ito ,  Daisuke Hayashi

发明人： Hideki Nagaoka ,  Hiroshi Koizumi ,  Jun Ooyabu ,  Tsuyoshi Shimazu ,  Hiroki Endo ,  Keiki Ito ,  Daisuke Hayashi

IPC分类号： B01J4/00 ,  H01L21/00 ,  B05B1/14

CPC分类号： H01L21/67253 ,  H01L21/67017 ,  Y10T137/2499 ,  Y10T137/7722 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8733

摘要： A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.

摘要翻译： 分压控制系统45包括从操作气体供给管44分支并且可变地控制操作气体的压力传感器3和分别连接到每个阀2的压力传感器3并且检测操作气体的压力的两个阀2， 以及控制器25，其基于压力传感器3的检测结果按比例地控制阀2的操作，从而相对控制两个阀的压力P1和P2。 利用这种结构，可以减少操作气体的浪费，并且提高相对于设定变化等的响应性。

公开(公告)号：US08109288B2

公开(公告)日：2012-02-07

申请号：US12219978

申请日：2008-07-31

申请人： Hideki Nagaoka ,  Hiroshi Koizumi ,  Jun Ooyabu ,  Tsuyoshi Shimazu ,  Hiroki Endo ,  Keiki Ito ,  Daisuke Hayashi

发明人： Hideki Nagaoka ,  Hiroshi Koizumi ,  Jun Ooyabu ,  Tsuyoshi Shimazu ,  Hiroki Endo ,  Keiki Ito ,  Daisuke Hayashi

IPC分类号： B05B1/14

CPC分类号： H01L21/67253 ,  H01L21/67017 ,  Y10T137/2499 ,  Y10T137/7722 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8733

摘要： A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.

摘要翻译： 分压控制系统45包括从操作气体供给管44分支并且可变地控制操作气体的压力传感器3和分别连接到每个阀2的压力传感器3并且检测操作气体的压力的两个阀2， 以及控制器25，其基于压力传感器3的检测结果按比例地控制阀2的操作，从而相对控制两个阀的压力P1和P2。 利用这种结构，可以减少操作气体的浪费，并且提高相对于设定变化等的响应性。

公开(公告)号：US20080300728A1

公开(公告)日：2008-12-04

申请号：US12219978

申请日：2008-07-31

申请人： Hideki Nagaoka ,  Hiroshi Koizumi ,  Jun Ooyabu ,  Tsuyoshi Shimazu ,  Hiroki Endo ,  Keiki Ito ,  Daisuke Hayashi

发明人： Hideki Nagaoka ,  Hiroshi Koizumi ,  Jun Ooyabu ,  Tsuyoshi Shimazu ,  Hiroki Endo ,  Keiki Ito ,  Daisuke Hayashi

IPC分类号： G05D7/00 ,  G05D16/00

CPC分类号： H01L21/67253 ,  H01L21/67017 ,  Y10T137/2499 ,  Y10T137/7722 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8733

摘要： A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.

摘要翻译： 分压控制系统45包括从操作气体供给管44分支并且可变地控制操作气体的压力传感器3和分别连接到每个阀2的压力传感器3并且检测操作气体的压力的两个阀2， 以及控制器25，其基于压力传感器3的检测结果按比例地控制阀2的操作，从而相对控制两个阀的压力P1和P2。 利用这种结构，可以减少操作气体的浪费，并且提高相对于设定变化等的响应性。

公开(公告)号：US08418714B2

公开(公告)日：2013-04-16

申请号：US11913277

申请日：2006-06-22

申请人： Tadahiro Ohmi ,  Masahito Saito ,  Shoichi Hino ,  Tsuyoshi Shimazu ,  Kazuyuki Miura ,  Kouji Nishino ,  Masaaki Nagase ,  Katsuyuki Sugita ,  Kaoru Hirata ,  Ryousuke Dohi ,  Takashi Hirose ,  Tsutomu Shinohara ,  Nobukazu Ikeda ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

发明人： Tadahiro Ohmi ,  Masahito Saito ,  Shoichi Hino ,  Tsuyoshi Shimazu ,  Kazuyuki Miura ,  Kouji Nishino ,  Masaaki Nagase ,  Katsuyuki Sugita ,  Kaoru Hirata ,  Ryousuke Dohi ,  Takashi Hirose ,  Tsutomu Shinohara ,  Nobukazu Ikeda ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

IPC分类号： F16K31/12 ,  F16K31/36

CPC分类号： G05D7/0641 ,  G01F1/363 ,  G01F1/6842 ,  G01F1/6847 ,  G01F5/005 ,  G01F7/005 ,  G05D7/0635 ,  G05D7/0647 ,  G05D23/1927 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/8593 ,  Y10T137/86734 ,  Y10T137/86815 ,  Y10T137/87265 ,  Y10T137/87314 ,  Y10T137/8741 ,  Y10T137/87499 ,  Y10T137/87684

摘要： A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m(P1−P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.

摘要翻译： 提供一种压力式流量控制装置，其中通过孔口的流体流量计算为Qc = KP1（其中K是比例常数）或Qc = KP2m（P1-P2）n（其中K是比例常数 ，m和n常数）通过使用孔口上游侧压力P1和/或孔口下游侧压力P2。 控制阀的下游侧和压力式流量控制装置的流体供给管之间的流体通道平行地包括至少2个流体通道，并且为每个这些流体通道设置具有不同流量特性的孔，其中 小流量区域中的流体流向一个孔，用于在小流量区域中的流体的流量控制，而大流量区域中的流体流向另一个孔口，用于大流量区域中的流体的流量控制。

公开(公告)号：US20100139775A1

公开(公告)日：2010-06-10

申请号：US11913277

申请日：2006-06-22

申请人： Tadahiro Ohmi ,  Masahito Saito ,  Shoichi Hino ,  Tsuyoshi Shimazu ,  Kazuyuki Miura ,  Kouji Nishino ,  Masaaki Nagase ,  Katsuyuki Sugita ,  Kaoru Hirata ,  Ryousuke Dohi ,  Takashi Hirose ,  Tsutomu Shinohara ,  Nobukazu Ikeda ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

发明人： Tadahiro Ohmi ,  Masahito Saito ,  Shoichi Hino ,  Tsuyoshi Shimazu ,  Kazuyuki Miura ,  Kouji Nishino ,  Masaaki Nagase ,  Katsuyuki Sugita ,  Kaoru Hirata ,  Ryousuke Dohi ,  Takashi Hirose ,  Tsutomu Shinohara ,  Nobukazu Ikeda ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

IPC分类号： F15D1/00

CPC分类号： G05D7/0641 ,  G01F1/363 ,  G01F1/6842 ,  G01F1/6847 ,  G01F5/005 ,  G01F7/005 ,  G05D7/0635 ,  G05D7/0647 ,  G05D23/1927 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/8593 ,  Y10T137/86734 ,  Y10T137/86815 ,  Y10T137/87265 ,  Y10T137/87314 ,  Y10T137/8741 ,  Y10T137/87499 ,  Y10T137/87684

摘要： A pressure type flow control device enabling a reduction in size and an installation cost by accurately controlling the flow of a fluid in a wide flow range. Specifically, the flow of the fluid flowing in an orifice (8) is calculated as Qc=KP1 (K is a proportionality factor) or Qc=KP2m(P1−P2)n (K is a proportionality factor and m and n are constants) by using a pressure P1 on the upstream side of the orifice and a pressure P2 on the downstream side of the orifice. A fluid passage between the downstream side of the control valve of the flow control device and a fluid feed pipe is formed of at least two or more fluid passages positioned parallel with each other. Orifices with different fluid flow characteristics are interposed in the fluid passages positioned parallel with each other. For the control of the fluid in a small flow area, the fluid in the small flow area is allowed to flow to one orifice. For the control of the flow in the large flow area, the fluid in the large flow area is allowed to flow to the other orifice by switching the fluid passages.

摘要翻译： 一种压力式流量控制装置，通过精确地控制在大流量范围内的流体的流动，能够减小尺寸和安装成本。 具体地说，在孔（8）中流动的流体的流量被计算为Qc = KP1（K是比例因子）或Qc = KP2m（P1-P2）n（K是比例因子，m和n是常数） 通过使用孔口上游侧的压力P1和孔口下游侧的压力P2。 在流量控制装置的控制阀的下游侧和流体供给管之间的流体通道由彼此平行定位的至少两个或更多个流体通道形成。 具有不同流体流动特性的孔口插入彼此平行定位的流体通道中。 为了控制小流量区域中的流体，允许小流量区域中的流体流到一个孔口。 为了控制大流量区域中的流动，通过切换流体通道允许大流量区域中的流体流向另一个孔口。