发明申请
US20060112876A1 Semiconductor processing apparatus 审中-公开
半导体处理装置

  • 专利标题: Semiconductor processing apparatus
  • 专利标题(中): 半导体处理装置
  • 申请号: US11154578
    申请日: 2005-06-17
  • 公开(公告)号: US20060112876A1
    公开(公告)日: 2006-06-01
  • 发明人: Jin ChoiSuk Lee
  • 申请人: Jin ChoiSuk Lee
  • 优先权: KR2004-98197 20041126
  • 主分类号: C23C16/00
  • IPC分类号: C23C16/00 H01L21/306 C23F1/00
Semiconductor processing apparatus
摘要:
A semiconductor processing apparatus, designed to inject reactant gas with uniform pressure and flux therein, includes a chamber in which a process is performed, a gas supply to supply reactant gas to the chamber, a gas dispenser having a plurality of nozzles to inject the reactant gas into the chamber, and a gas distribution route formed in the gas dispenser to uniformly distribute the reactant gas supplied from the gas supply to the nozzles.
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