发明申请
- 专利标题： Controlling effusion cell of deposition system
- 专利标题（中）： 控制沉积系统的积液细胞
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申请号： US11325558申请日： 2006-01-05
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公开(公告)号： US20060147628A1公开(公告)日： 2006-07-06
- 发明人: Min-Jeong Hwang , Kwan-Seop Song , Do-Geun Kim , Jae-Hong Ahn , Sung-Ho Lee
- 申请人： Min-Jeong Hwang , Kwan-Seop Song , Do-Geun Kim , Jae-Hong Ahn , Sung-Ho Lee
- 优先权： KR10-2005-0001084 20050106; KR10-2005-0001085 20050106
- 主分类号： C23C16/00
- IPC分类号： C23C16/00 ; B05C11/00
摘要：
In a method of controlling an effusion cell in a deposition system, including a crucible, a guiding pathway and an injection nozzle, a guiding pathway and an injection nozzle are heated. The crucible is heated after heating the guiding pathway and the injection nozzle. In addition, in cooling the effusion cell including a crucible, a guiding pathway and an injection nozzle, the crucible is cooled. The guiding pathway and the injection nozzle are cooled after cooling the crucible. This method has an advantage of enhancing uniformity of the organic layer formed on the substrate by preventing the clogging of the injection nozzle by deposition material vaporized in the crucible or splashing.
公开/授权文献
- US07862855B2 Controlling effusion cell of deposition system 公开/授权日：2011-01-04
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