发明申请
- 专利标题: Methods of forming semiconductor constructions
- 专利标题(中): 形成半导体结构的方法
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申请号: US11375696申请日: 2006-03-13
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公开(公告)号: US20060205142A1公开(公告)日: 2006-09-14
- 发明人: Er-Xuan Ping , Zhiping Yin
- 申请人: Er-Xuan Ping , Zhiping Yin
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 主分类号: H01L29/94
- IPC分类号: H01L29/94 ; H01L27/108 ; H01L29/76 ; H01L31/119 ; H01L21/8242
摘要:
The invention encompasses a method of forming a silicon nitride layer. A substrate is provided which comprises a first mass and a second mass. The first mass comprises silicon and the second mass comprises silicon oxide. A sacrificial layer is formed over the first mass. While the sacrificial layer is over the first mass, a nitrogen-containing material is formed across the second mass. After the nitrogen-containing material is formed, the sacrificial layer is removed. Subsequently, a silicon nitride layer is formed to extend across the first and second masses, with the silicon nitride layer being over the nitrogen-containing material. Also, a conductivity-enhancing dopant is provided within the first mass. The invention also pertains to methods of forming capacitor constructions.
公开/授权文献
- US07244648B2 Methods of forming semiconductor constructions 公开/授权日:2007-07-17
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