发明申请
US20060213430A1 Seeded single crystal silicon carbide growth and resulting crystals 有权
种子单晶碳化硅生长并产生晶体

Seeded single crystal silicon carbide growth and resulting crystals
摘要:
A method is disclosed for producing a high quality bulk single crystal of silicon carbide in a seeded growth system and in the absence of a solid silicon carbide source, by reducing the separation between a silicon carbide seed crystal and a seed holder until the conductive heat transfer between the seed crystal and the seed holder dominates the radiative heat transfer between the seed crystal and the seed holder over substantially the entire seed crystal surface that is adjacent the seed holder.
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