发明申请
- 专利标题: Seeded single crystal silicon carbide growth and resulting crystals
- 专利标题(中): 种子单晶碳化硅生长并产生晶体
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申请号: US11248579申请日: 2005-10-12
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公开(公告)号: US20060213430A1公开(公告)日: 2006-09-28
- 发明人: Jason Jenny , David Malta , Hudson Hobgood , Stephan Mueller , Mark Brady , Robert Leonard , Adrian Powell , Valeri Tsvetkov , George Fechko , Calvin Carter
- 申请人: Jason Jenny , David Malta , Hudson Hobgood , Stephan Mueller , Mark Brady , Robert Leonard , Adrian Powell , Valeri Tsvetkov , George Fechko , Calvin Carter
- 主分类号: C30B23/00
- IPC分类号: C30B23/00 ; C30B28/12 ; C30B28/14
摘要:
A method is disclosed for producing a high quality bulk single crystal of silicon carbide in a seeded growth system and in the absence of a solid silicon carbide source, by reducing the separation between a silicon carbide seed crystal and a seed holder until the conductive heat transfer between the seed crystal and the seed holder dominates the radiative heat transfer between the seed crystal and the seed holder over substantially the entire seed crystal surface that is adjacent the seed holder.
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