- 专利标题: Nonvolatile semiconductor storage device and manufacturing method therefor
-
申请号: US11224049申请日: 2005-09-13
-
公开(公告)号: US20060214217A1公开(公告)日: 2006-09-28
- 发明人: Hiroshi Watanabe , Atsuhiro Kinoshita , Akira Takashima , Daisuke Hagishima
- 申请人: Hiroshi Watanabe , Atsuhiro Kinoshita , Akira Takashima , Daisuke Hagishima
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 优先权: JP2005-86803 20050324
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A nonvolatile semiconductor storage device includes a semiconductor substrate; a plurality of isolation regions formed in the semiconductor substrate; an element-forming region formed between adjacent isolation regions; a first gate insulating film provided on the element-forming region; a floating gate electrode which is provided on the first gate insulating film and in which a width of a lower hem facing the element-forming region is narrower than a width of the element-forming region in a section taken in a direction perpendicular to a direction in which the isolation regions extend; a second gate insulating film provided on the floating gate electrode; and a control gate electrode provided on the second gate insulating film.
公开/授权文献
信息查询
IPC分类: