- 专利标题: Metal-semiconductor contact, semiconductor component, integrated circuit arrangement and method
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申请号: US11455397申请日: 2006-06-19
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公开(公告)号: US20060244060A1公开(公告)日: 2006-11-02
- 发明人: Holger Kapels , Anton Mauder , Hans-Joachim Schulze , Helmut Strack , Jenoe Tihanyi
- 申请人: Holger Kapels , Anton Mauder , Hans-Joachim Schulze , Helmut Strack , Jenoe Tihanyi
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 优先权: DE10217610.8-33 20020419
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
The present invention relates to a metal-semiconductor contact comprising a semiconductor layer and comprising a metallization applied to the semiconductor layer, a high dopant concentration being introduced into the semiconductor layer such that a non-reactive metal-semiconductor contact is formed between the metallization and the semiconductor layer. The metallization and/or the semiconductor layer are formed in such a way that only a fraction of the introduced doping concentration is electrically active, and a semiconductor layer doped only with this fraction of the doping concentration only forms a Schottky contact when contact is made with the metallization. Furthermore, the invention relates to a semiconductor component comprising a drain zone, body zones embedded therein and source zones again embedded therein. The semiconductor component has metal-semiconductor contacts in which the contacts made contact only with the source zones but not with the body zones.
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