- 专利标题: System and method for product yield prediction
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申请号: US11503323申请日: 2006-08-10
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公开(公告)号: US20060277506A1公开(公告)日: 2006-12-07
- 发明人: Brian Stine , Christopher Hess , John Kibarian , Kimon Michaels , Joseph Davis , Purnendu Mozumder , Sherry Lee , Larg Weiland , Dennis Ciplickas , David Stashower
- 申请人: Brian Stine , Christopher Hess , John Kibarian , Kimon Michaels , Joseph Davis , Purnendu Mozumder , Sherry Lee , Larg Weiland , Dennis Ciplickas , David Stashower
- 申请人地址: US CA San Jose
- 专利权人: PDF Solutions, Inc.
- 当前专利权人: PDF Solutions, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A system and method for predicting yield of integrated circuits includes at least one type of characterization vehicle which incorporates at least one feature which is representative of at least one type of feature to be incorporated in the final integrated circuit product. The characterization vehicle is subjected to at least one of the process operations making up the fabrication cycle to be used in fabricating the integrated circuit product in order to produce a yield model. The yield model embodies a layout as defined by the characterization vehicle and preferably includes features which facilitate the gathering of electrical test data and testing of prototype sections at operating speeds. An extraction engine extracts predetermined layout attributes from a proposed product layout. Operating on the yield model, the extraction engine produces yield predictions as a function of layout attributes and broken down by layers or steps in the fabrication process. These yield predictions are then used to determine which areas in the fabrication process require the most improvement.
公开/授权文献
- US07356800B2 System and method for product yield prediction 公开/授权日:2008-04-08
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