Invention Application
- Patent Title: WRITE POLE FABRICATION FOR PERPENDICULAR RECORDING
- Patent Title (中): 写字符制造用于完整记录
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Application No.: US11469132Application Date: 2006-08-31
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Publication No.: US20060288565A1Publication Date: 2006-12-28
- Inventor: Quang Le , Edward Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
- Applicant: Quang Le , Edward Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
- Assignee: HITACHI GLOBAL STORAGE TECHNOLOGIES
- Current Assignee: HITACHI GLOBAL STORAGE TECHNOLOGIES
- Main IPC: G11B5/127
- IPC: G11B5/127

Abstract:
Methods for forming write heads. One method includes forming a mask layer above a pole tip layer; forming a layer of resist above the mask layer; patterning the resist; removing portions of the mask layer not covered by the patterned resist; shaping a pole tip from the pole tip layer; depositing a layer of dielectric material above the pole tip and flux shaping layer, wherein the layer of dielectric material extends about adjacent to the mask layer; depositing a stop layer over the dielectric material, the stop layer abutting the mask layer; and polishing for forming a substantially planar upper surface comprising the mask layer and stop layer. Another method includes depositing a layer of dielectric material at least adjacent the pole tip, wherein the layer of dielectric material extends about adjacent to the mask layer. A further method includes forming dishing in the pole tip.
Public/Granted literature
- US07464457B2 Method for forming a write head having an air bearing surface (ABS) Public/Granted day:2008-12-16
Information query
IPC分类: