发明申请
- 专利标题: WRITE POLE FABRICATION FOR PERPENDICULAR RECORDING
- 专利标题(中): 写字符制造用于完整记录
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申请号: US11469132申请日: 2006-08-31
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公开(公告)号: US20060288565A1公开(公告)日: 2006-12-28
- 发明人: Quang Le , Edward Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
- 申请人: Quang Le , Edward Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
- 专利权人: HITACHI GLOBAL STORAGE TECHNOLOGIES
- 当前专利权人: HITACHI GLOBAL STORAGE TECHNOLOGIES
- 主分类号: G11B5/127
- IPC分类号: G11B5/127
摘要:
Methods for forming write heads. One method includes forming a mask layer above a pole tip layer; forming a layer of resist above the mask layer; patterning the resist; removing portions of the mask layer not covered by the patterned resist; shaping a pole tip from the pole tip layer; depositing a layer of dielectric material above the pole tip and flux shaping layer, wherein the layer of dielectric material extends about adjacent to the mask layer; depositing a stop layer over the dielectric material, the stop layer abutting the mask layer; and polishing for forming a substantially planar upper surface comprising the mask layer and stop layer. Another method includes depositing a layer of dielectric material at least adjacent the pole tip, wherein the layer of dielectric material extends about adjacent to the mask layer. A further method includes forming dishing in the pole tip.
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