发明申请
- 专利标题: Methods & apparatus for ion beam angle measurement in two dimensions
- 专利标题(中): 二维离子束角度测量方法与装置
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申请号: US11336466申请日: 2006-01-20
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公开(公告)号: US20060289798A1公开(公告)日: 2006-12-28
- 发明人: James Cummings , Joseph Olson , Arthur Clough , Eric Hermanson , Rosario Mollica , Paul Murphy , Mark Donahue
- 申请人: James Cummings , Joseph Olson , Arthur Clough , Eric Hermanson , Rosario Mollica , Paul Murphy , Mark Donahue
- 申请人地址: US MA Gloucester
- 专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址: US MA Gloucester
- 主分类号: H01J37/08
- IPC分类号: H01J37/08
摘要:
An angle measurement system for an ion beam includes a flag defining first and second features, wherein the second feature has a variable spacing from the first feature, a mechanism to translate the flag along a translation path so that the flag intercepts at least a portion of the ion beam, and a sensing device to detect the ion beam for different flag positions along the translation path and produce a sensor signal in response to the detected ion beam. The sensor signal and corresponding positions of the flag are representative of a vertical beam angle of the ion beam in a vertical plane. The sensing device may include a mask and a mechanism to translate the mask in order to define a beam current sensor on a portion of an associated Faraday sensor.
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