Methods and apparatus for the micro-scale, dielectrophoretic separation of particles are provided. Fluid suspensions of particles are sorted and separated by dielectrophoretic separation chambers that have at least two consecutive, electrically coupled planar electrodes separated by a gap in a fluid flow channel. The gap distance as well as applied potential can be used to control the dielectrophoretic forces generated. Using consecutive, electrically coupled electrodes rather than electrically coupled opposing electrodes facilitates higher flow volumes and rates. The methods and apparatus can be used, for example, to sort living, damaged, diseased, and/or dead cells and functionalized or ligand-bound polymer beads for subsequent identification and/or analysis.