发明申请
US20070064384A1 Method to transfer a template transfer body between a motion stage and a docking plate 审中-公开
在运动台和对接板之间传送模板转印体的方法

Method to transfer a template transfer body between a motion stage and a docking plate
摘要:
The present is directed towards a method of transferring a body between a motion stage and a docking system, the method including, inter alia, positioning the body between the motion stage and the docking system, with the motion stage being spaced-apart from the docking system a distance; and transferring a coupling of the body between the motion stage and the docking system, with the distance being established to minimize a probability of a collision between any of the docking system, the motion stage and the body while transferring the body between the docking system and the motion stage.
信息查询
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