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    System to transfer a template transfer body between a motion stage and a docking plate
    2.
    发明申请
    System to transfer a template transfer body between a motion stage and a docking plate 有权
    在运动台和对接板之间传送模板转印体的系统

    公开(公告)号：US20070071582A1

    公开(公告)日：2007-03-29

    申请号：US11211766

    申请日：2005-08-25

    申请人： Philip Schumaker ,  Angelo Fancello ,  Jae Kim ,  Byung-Jin Choi ,  Daniel Babbs

    发明人： Philip Schumaker ,  Angelo Fancello ,  Jae Kim ,  Byung-Jin Choi ,  Daniel Babbs

    IPC分类号： B65H1/00

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/707

    摘要： The present is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart from the docking plate a first distance; and a body, having first and second opposed sides spaced-apart a second distance, selectively coupled between the docking plate and the motion stage, the first distance being greater than the second distance to minimize a probability of a collision between the docking plate, the motion stage and the body while transferring the body between the docking plate and the motion stage.

    摘要翻译： 本发明涉及一种压印光刻系统，其特别包括对接板; 具有与其相关联的运动范围的运动台，所述运动范围具有与所述对接板间隔开的第一距离的周边; 以及主体，其具有间隔开第二距离的第一和第二相对侧，其选择性地联接在所述对接板和所述运动台之间，所述第一距离大于所述第二距离以最小化对接板之间的碰撞概率， 运动台和身体，同时在对接板和运动台之间转移身体。

    Method to transfer a template transfer body between a motion stage and a docking plate
    3.
    发明申请
    Method to transfer a template transfer body between a motion stage and a docking plate 审中-公开
    在运动台和对接板之间传送模板转印体的方法

    公开(公告)号：US20070064384A1

    公开(公告)日：2007-03-22

    申请号：US11211763

    申请日：2005-08-25

    申请人： Philip Schumaker ,  Angelo Fancello ,  Jae Kim ,  Byung-Jin Choi ,  Daniel Babbs

    发明人： Philip Schumaker ,  Angelo Fancello ,  Jae Kim ,  Byung-Jin Choi ,  Daniel Babbs

    IPC分类号： G06F1/16

    CPC分类号： B29C33/30

    摘要： The present is directed towards a method of transferring a body between a motion stage and a docking system, the method including, inter alia, positioning the body between the motion stage and the docking system, with the motion stage being spaced-apart from the docking system a distance; and transferring a coupling of the body between the motion stage and the docking system, with the distance being established to minimize a probability of a collision between any of the docking system, the motion stage and the body while transferring the body between the docking system and the motion stage.

    摘要翻译： 本发明涉及一种在运动台和对接系统之间传送身体的方法，所述方法尤其包括将身体定位在运动台和对接系统之间，运动台与对接系统间隔开 系统距离; 以及在所述运动台和所述对接系统之间传递所述主体的联接，其中建立所述距离以使所述对接系统，所述运动台和所述主体之间的任何一个之间的碰撞的概率最小化，同时在所述对接系统和所述对接系统 运动阶段。

    System to transfer a template transfer body between a motion stage and a docking plate
    6.
    发明授权
    System to transfer a template transfer body between a motion stage and a docking plate 有权
    在运动台和对接板之间传送模板转印体的系统

    公开(公告)号：US07665981B2

    公开(公告)日：2010-02-23

    申请号：US11211766

    申请日：2005-08-25

    申请人： Philip D. Schumaker ,  Angelo Fancello ,  Jae H. Kim ,  Byung-Jin Choi ,  Daniel A. Babbs

    发明人： Philip D. Schumaker ,  Angelo Fancello ,  Jae H. Kim ,  Byung-Jin Choi ,  Daniel A. Babbs

    IPC分类号： B29C59/00

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/707

    摘要： The present is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart from the docking plate a first distance; and a body, having first and second opposed sides spaced-apart a second distance, selectively coupled between the docking plate and the motion stage, the first distance being greater than the second distance to minimize a probability of a collision between the docking plate, the motion stage and the body while transferring the body between the docking plate and the motion stage.

    摘要翻译： 本发明涉及一种压印光刻系统，其特别包括对接板; 具有与其相关联的运动范围的运动台，所述运动范围具有与所述对接板间隔开的第一距离的周边; 以及主体，其具有间隔开第二距离的第一和第二相对侧，其选择性地联接在所述对接板和所述运动台之间，所述第一距离大于所述第二距离以最小化对接板之间的碰撞概率， 运动台和身体，同时在对接板和运动台之间转移身体。

    Method of retaining a substrate to a wafer chuck
    7.
    发明申请
    Method of retaining a substrate to a wafer chuck 有权
    将基板保持在晶片卡盘上的方法

    公开(公告)号：US20060172553A1

    公开(公告)日：2006-08-03

    申请号：US11047499

    申请日：2005-01-31

    申请人： Byung-Jin Choi ,  Anshuman Cherala ,  Daniel Babbs

    发明人： Byung-Jin Choi ,  Anshuman Cherala ,  Daniel Babbs

    IPC分类号： H01L21/31 ,  H01L21/469

    CPC分类号： H01L21/6831 ,  H01L21/6838 ,  Y10T29/4978 ,  Y10T29/49998

    摘要： The present invention is directed towards a method of retaining a substrate to a wafer chuck. The method features accelerating a portion of the substrate toward the wafer chuck, generating a velocity of travel of the substrate toward the wafer chuck, and reducing the velocity before the substrate reaches the wafer chuck. In this manner, the force of impact of the portion with the wafer chuck is greatly reduced, which is believed to reduce the probability that the structural integrity of the substrate, and layers on the substrate and/or the wafer chuck, are damaged.

    摘要翻译： 本发明涉及将基板保持在晶片卡盘上的方法。 该方法特征在于，将基板的一部分朝向晶片卡盘加速，产生基板朝向晶片卡盘的移动速度，并降低基板到达晶片卡盘之前的速度。 以这种方式，晶片卡盘的部分的冲击力大大降低，这被认为降低了基板的结构完整性和基板和/或晶片卡盘上的层被损坏的可能性。

    Chucking system for nano-manufacturing
    9.
    发明申请
    Chucking system for nano-manufacturing 有权
    用于纳米制造的卡盘系统

    公开(公告)号：US20060172031A1

    公开(公告)日：2006-08-03

    申请号：US11047428

    申请日：2005-01-31

    申请人： Daniel Babbs ,  Byung-Jin Choi ,  Anshuman Cherala

    发明人： Daniel Babbs ,  Byung-Jin Choi ,  Anshuman Cherala

    IPC分类号： B28B11/08

    CPC分类号： H01L21/6875 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H01L21/6838 ,  Y10S977/887

    摘要： The present invention is directed towards a chucking system, including, inter alia, a body having a surface with a pin extending therefrom having a throughway defined therein, and a land surrounding the protrusions defining a channel between the pin and the land. In a further embodiment, the body comprises a plurality of protrusions.

    摘要翻译： 本发明涉及一种夹紧系统，其特征在于，包括具有表面的主体，所述主体具有从其延伸的销，所述销具有限定在其中的通道，以及围绕所述突出部的凸台限定所述销和所述平台之间的通道。 在另一个实施例中，主体包括多个突起。