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    Method to transfer a template transfer body between a motion stage and a docking plate
    1.
    发明申请
    Method to transfer a template transfer body between a motion stage and a docking plate 审中-公开
    在运动台和对接板之间传送模板转印体的方法

    公开(公告)号：US20070064384A1

    公开(公告)日：2007-03-22

    申请号：US11211763

    申请日：2005-08-25

    申请人： Philip Schumaker ,  Angelo Fancello ,  Jae Kim ,  Byung-Jin Choi ,  Daniel Babbs

    发明人： Philip Schumaker ,  Angelo Fancello ,  Jae Kim ,  Byung-Jin Choi ,  Daniel Babbs

    IPC分类号： G06F1/16

    CPC分类号： B29C33/30

    摘要： The present is directed towards a method of transferring a body between a motion stage and a docking system, the method including, inter alia, positioning the body between the motion stage and the docking system, with the motion stage being spaced-apart from the docking system a distance; and transferring a coupling of the body between the motion stage and the docking system, with the distance being established to minimize a probability of a collision between any of the docking system, the motion stage and the body while transferring the body between the docking system and the motion stage.

    摘要翻译： 本发明涉及一种在运动台和对接系统之间传送身体的方法，所述方法尤其包括将身体定位在运动台和对接系统之间，运动台与对接系统间隔开 系统距离; 以及在所述运动台和所述对接系统之间传递所述主体的联接，其中建立所述距离以使所述对接系统，所述运动台和所述主体之间的任何一个之间的碰撞的概率最小化，同时在所述对接系统和所述对接系统 运动阶段。

    System to transfer a template transfer body between a motion stage and a docking plate
    3.
    发明申请
    System to transfer a template transfer body between a motion stage and a docking plate 有权
    在运动台和对接板之间传送模板转印体的系统

    公开(公告)号：US20070071582A1

    公开(公告)日：2007-03-29

    申请号：US11211766

    申请日：2005-08-25

    申请人： Philip Schumaker ,  Angelo Fancello ,  Jae Kim ,  Byung-Jin Choi ,  Daniel Babbs

    发明人： Philip Schumaker ,  Angelo Fancello ,  Jae Kim ,  Byung-Jin Choi ,  Daniel Babbs

    IPC分类号： B65H1/00

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/707

    摘要： The present is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart from the docking plate a first distance; and a body, having first and second opposed sides spaced-apart a second distance, selectively coupled between the docking plate and the motion stage, the first distance being greater than the second distance to minimize a probability of a collision between the docking plate, the motion stage and the body while transferring the body between the docking plate and the motion stage.

    摘要翻译： 本发明涉及一种压印光刻系统，其特别包括对接板; 具有与其相关联的运动范围的运动台，所述运动范围具有与所述对接板间隔开的第一距离的周边; 以及主体，其具有间隔开第二距离的第一和第二相对侧，其选择性地联接在所述对接板和所述运动台之间，所述第一距离大于所述第二距离以最小化对接板之间的碰撞概率， 运动台和身体，同时在对接板和运动台之间转移身体。

    Imprint lithography template having opaque alignment marks
    9.
    发明申请
    Imprint lithography template having opaque alignment marks 有权
    具有不透明对准标记的压印光刻模板

    公开(公告)号：US20050067379A1

    公开(公告)日：2005-03-31

    申请号：US10670980

    申请日：2003-09-25

    申请人： Sidlgata Sreenivasan ,  Philip Schumaker

    发明人： Sidlgata Sreenivasan ,  Philip Schumaker

    IPC分类号： C23F1/00 ,  G03F7/00 ,  G03F9/00

    CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/00

    摘要： The present invention is directed to providing a template with alignment marks that are opaque to selective wavelength of light. In one embodiment, a template is provided having patterning areas and a template, with the template mark being formed from metal and disposed outside of the patterning areas. The alignment marks may be surrounded by a moat to prevent curable liquid from being in superimposition therewith during imprinting. In this manner, opaque alignment marks may be employed without degrading the quality of the pattern formed during imprinting.

    摘要翻译： 本发明旨在提供一种具有对选择性波长的光不透明的对准标记的模板。 在一个实施例中，提供具有图案化区域和模板的模板，其中模板标记由金属形成并且设置在图案化区域的外部。 对准标记可以由护城河包围，以防止可印刷过程中可固化液体与其重叠。 以这种方式，可以使用不透明的对准标记而不降低在压印期间形成的图案的质量。