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公开(公告)号：US20070247608A1
公开(公告)日：2007-10-25
申请号：US11694612
申请日：2007-03-30
IPC分类号： G03B27/62
CPC分类号： G03B27/62 , B82Y10/00 , B82Y40/00 , G03B27/42 , G03F7/0002 , G03F9/00 , G03F9/7042 , G03F9/7076 , G03F9/7084
摘要： The present invention is directed towards a choice of the shape of the patterned fields for Level 0 (patterned by imprint or photolithography or e-beam, etc.) and Level 1 (patterned by imprint) such that these shapes when tessellated together eliminate the open areas causes by the moats.
摘要翻译： 本发明涉及用于0级（通过压印或光刻或电子束等图案化）和1级（通过印记图案化）的图案化场的形状的选择，使得这些形状在细分时一起消除开路 地区由护城河引起。
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2.发明申请Method and system to measure characteristics of a film disposed on a substrate 有权测量设置在基板上的膜的特性的方法和系统公开(公告)号：US20050185169A1
公开(公告)日：2005-08-25
申请号：US10782187
申请日：2004-02-19
CPC分类号： G03F7/0002 , B29C43/003 , B29C2043/025 , B81C1/0046 , B81C99/004 , B82Y10/00 , B82Y40/00 , G01N21/8422 , G03F7/70625 , G03F7/7065
摘要： The present invention is directed to providing a method and system to measure characteristics of a film disposed on a substrate. The method includes identifying a plurality of processing regions on the film; measuring characteristics of a subset of the plurality of processing regions, defining measured characteristics; determining a variation of one of the measured characteristics; and associating a cause of the variations based upon a comparison of the one of the measured characteristics to measured characteristics associated with the remaining processing regions of the subset. The system carries out the aforementioned method.
摘要翻译： 本发明旨在提供一种测量设置在基底上的膜的特性的方法和系统。 该方法包括识别胶片上的多个处理区域; 测量所述多个处理区域的子集的特征，定义测量的特征; 确定测量特征之一的变化; 并且基于所测量的特征之一与与所述子集的剩余处理区域相关联的测量特征的比较来将所述变化的原因相关联。 系统执行上述方法。
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公开(公告)号：US20070074635A1
公开(公告)日：2007-04-05
申请号：US11211785
申请日：2005-08-25
申请人： Philip Schumaker , Angelo Fancello , Jae Kim , Byung-Jin Choi , Daniel Babbs
发明人： Philip Schumaker , Angelo Fancello , Jae Kim , Byung-Jin Choi , Daniel Babbs
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： The present is directed towards a coupling system including, inter alia, a docking plate having a protrusion positioned thereon, the protrusion controlling an orientation of a body in contact therewith to facilitate a coupling of the body to the docking plate.
摘要翻译： 本发明涉及一种联接系统，其特别地包括具有定位在其上的突起的对接板，所述突起控制与其接触的主体的定向，以便于主体与对接板的联接。
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4.发明申请System to transfer a template transfer body between a motion stage and a docking plate 有权在运动台和对接板之间传送模板转印体的系统公开(公告)号：US20070071582A1
公开(公告)日：2007-03-29
申请号：US11211766
申请日：2005-08-25
申请人： Philip Schumaker , Angelo Fancello , Jae Kim , Byung-Jin Choi , Daniel Babbs
发明人： Philip Schumaker , Angelo Fancello , Jae Kim , Byung-Jin Choi , Daniel Babbs
IPC分类号： B65H1/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F7/707
摘要： The present is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart from the docking plate a first distance; and a body, having first and second opposed sides spaced-apart a second distance, selectively coupled between the docking plate and the motion stage, the first distance being greater than the second distance to minimize a probability of a collision between the docking plate, the motion stage and the body while transferring the body between the docking plate and the motion stage.
摘要翻译： 本发明涉及一种压印光刻系统，其特别包括对接板; 具有与其相关联的运动范围的运动台，所述运动范围具有与所述对接板间隔开的第一距离的周边; 以及主体，其具有间隔开第二距离的第一和第二相对侧，其选择性地联接在所述对接板和所述运动台之间，所述第一距离大于所述第二距离以最小化对接板之间的碰撞概率， 运动台和身体，同时在对接板和运动台之间转移身体。
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公开(公告)号：US20060114450A1
公开(公告)日：2006-06-01
申请号：US11000321
申请日：2004-11-30
申请人： Pawan Nimmakayala , Tom Rafferty , Alireza Aghili , Byung-Jin Choi , Philip Schumaker , Daniel Babbs , Van Truskett
发明人： Pawan Nimmakayala , Tom Rafferty , Alireza Aghili , Byung-Jin Choi , Philip Schumaker , Daniel Babbs , Van Truskett
CPC分类号： G01B11/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/00 , G03F9/7003 , G03F9/7042 , G03F9/7049
摘要： The present invention features a method to determine relative spatial parameters between two coordinate systems, which may be a mold and a region of a substrate in which mold is employed to generate a pattern. The method includes sensing relative alignment between the two coordinate systems at multiple points and determines relative spatial parameters therebetween. The relative spatial parameters include a relative area and a relative shape.
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6.发明申请公开(公告)号：US20050270312A1
公开(公告)日：2005-12-08
申请号：US11143092
申请日：2005-06-02
申请人： Pankaj Lad , Ian McMackin , Van Truskett , Norman Schumaker , Sidlgata Sreenivasan , Duane Voth , Philip Schumaker , Edward Fletcher
发明人： Pankaj Lad , Ian McMackin , Van Truskett , Norman Schumaker , Sidlgata Sreenivasan , Duane Voth , Philip Schumaker , Edward Fletcher
CPC分类号： B82Y10/00 , B41J3/28 , B82Y40/00 , G03F7/0002 , H01L51/0004
摘要： The present invention is directed to a method for dispensing a total volume of liquid on a substrate, the method including, inter alia, disposing a plurality of spaced-apart droplets on a region of the substrate, each having an unit volume associated therewith, with an aggregate volume of the droplets in the region being a function of a volume of a pattern to be formed thereat.
摘要翻译： 本发明涉及一种用于在基底上分配总体积的液体的方法，该方法尤其包括在衬底区域上设置多个间隔开的液滴，每个液滴具有与之相关联的单位体积，与 该区域中的液滴的总体积是要在其上形成的图案的体积的函数。
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7.发明申请Method to transfer a template transfer body between a motion stage and a docking plate 审中-公开在运动台和对接板之间传送模板转印体的方法公开(公告)号：US20070064384A1
公开(公告)日：2007-03-22
申请号：US11211763
申请日：2005-08-25
申请人： Philip Schumaker , Angelo Fancello , Jae Kim , Byung-Jin Choi , Daniel Babbs
发明人： Philip Schumaker , Angelo Fancello , Jae Kim , Byung-Jin Choi , Daniel Babbs
IPC分类号： G06F1/16
CPC分类号： B29C33/30
摘要： The present is directed towards a method of transferring a body between a motion stage and a docking system, the method including, inter alia, positioning the body between the motion stage and the docking system, with the motion stage being spaced-apart from the docking system a distance; and transferring a coupling of the body between the motion stage and the docking system, with the distance being established to minimize a probability of a collision between any of the docking system, the motion stage and the body while transferring the body between the docking system and the motion stage.
摘要翻译： 本发明涉及一种在运动台和对接系统之间传送身体的方法，所述方法尤其包括将身体定位在运动台和对接系统之间，运动台与对接系统间隔开 系统距离; 以及在所述运动台和所述对接系统之间传递所述主体的联接，其中建立所述距离以使所述对接系统，所述运动台和所述主体之间的任何一个之间的碰撞的概率最小化，同时在所述对接系统和所述对接系统 运动阶段。
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公开(公告)号：US20060126058A1
公开(公告)日：2006-06-15
申请号：US11000331
申请日：2004-11-30
申请人： Pawan Nimmakayala , Tom Rafferty , Alireza Aghili , Byung-Jin Choi , Philip Schumaker , Daniel Babbs
发明人： Pawan Nimmakayala , Tom Rafferty , Alireza Aghili , Byung-Jin Choi , Philip Schumaker , Daniel Babbs
CPC分类号： G03F9/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/7003 , G03F9/703 , G03F9/7042 , G03F9/7049 , G03F9/7076
摘要： The present invention features a system to determine relative spatial parameters between two coordinate systems, which may be a mold and a region of a substrate in which mold is employed to generate a pattern. The system senses relative alignment between the two coordinate systems at multiple points and determines relative spatial parameters therebetween. The relative spatial parameters include a relative area and a relative shape.
摘要翻译： 本发明的特征在于确定两个坐标系之间的相对空间参数的系统，其可以是模具和其中模具用于产生图案的基板的区域。 该系统在多个点处感测两个坐标系之间的相对对准，并确定它们之间的相对空间参数。 相对空间参数包括相对面积和相对形状。
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公开(公告)号：US20070228593A1
公开(公告)日：2007-10-04
申请号：US11694017
申请日：2007-03-30
IPC分类号： B29C43/02
CPC分类号： G03F7/0002 , B29C43/003 , B29C43/021 , B29C43/58 , B29C2043/025 , B29C2043/5825 , B29C2043/5891 , B82Y10/00 , B82Y40/00
摘要： In nano-imprint lithography it is important to detect thickness non-uniformity of a residual layer formed on a substrate. Such non-uniformity is compensated such that a uniform residual layer may be formed. Compensation is performed by calculating a corrected fluid drop pattern.
摘要翻译： 在纳米压印光刻中，重要的是检测在衬底上形成的残留层的厚度不均匀性。 补偿这种不均匀性，使得可以形成均匀的残留层。 通过计算校正的液滴图案来进行补偿。
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公开(公告)号：US20050067379A1
公开(公告)日：2005-03-31
申请号：US10670980
申请日：2003-09-25
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/00
摘要： The present invention is directed to providing a template with alignment marks that are opaque to selective wavelength of light. In one embodiment, a template is provided having patterning areas and a template, with the template mark being formed from metal and disposed outside of the patterning areas. The alignment marks may be surrounded by a moat to prevent curable liquid from being in superimposition therewith during imprinting. In this manner, opaque alignment marks may be employed without degrading the quality of the pattern formed during imprinting.
摘要翻译： 本发明旨在提供一种具有对选择性波长的光不透明的对准标记的模板。 在一个实施例中，提供具有图案化区域和模板的模板，其中模板标记由金属形成并且设置在图案化区域的外部。 对准标记可以由护城河包围，以防止可印刷过程中可固化液体与其重叠。 以这种方式，可以使用不透明的对准标记而不降低在压印期间形成的图案的质量。
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