Invention Application
US20070077674A1 PROCESS FOR PRODUCING SEMICONDUCTOR LIGHT-EMITTING DEVICE 审中-公开
制造半导体发光装置的方法

PROCESS FOR PRODUCING SEMICONDUCTOR LIGHT-EMITTING DEVICE
Abstract:
A process for producing a semiconductor light-emitting device is provided. The process includes providing a substrate including a substrate surface oriented along a substrate surface plane, forming a crystal seed layer on the substrate surface, forming a masking layer on the crystal seed layer, wherein the masking layer includes an opening, forming a crystal layer by selective growth of the crystal seed layer through the opening of the masking layer, wherein the crystal layer includes a crystal layer surface oriented along a crystal layer plane that diagonally intersects the substrate surface, and forming each of a first conductive layer, an active layer, and a second conductive layer along at least a portion of the crystal layer surface.
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