发明申请
- 专利标题： Ferroelectric capacitor
- 专利标题（中）： 铁电电容器
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申请号： US11493525申请日： 2006-07-27
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公开(公告)号： US20070090426A1公开(公告)日： 2007-04-26
- 发明人: Kazunori Isogai
- 申请人： Kazunori Isogai
- 优先权： JP2005-305994 20051020
- 主分类号： H01L29/94
- IPC分类号： H01L29/94 ; H01L29/76 ; H01L31/00 ; H01L29/00 ; H01L27/108 ; H01L31/119
摘要：
A ferroelectric capacitor includes a bottom electrode formed on a substrate, a ferroelectric material film formed on the bottom electrode and a top electrode formed on the ferroelectric material film. The ferroelectric material film is predominantly made of a compound represented by the general formula of SrxBiyTa2-zNbzO9 (wherein 0.69≦x≦0.81, 2.09≦y≦2.31 and z=0 or 0.35≦z≦0.98).
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