发明申请
US20070133289A1 NAND-type flash memory device with high voltage PMOS and embedded poly and methods of fabricating the same
审中-公开
具有高压PMOS和嵌入式多晶硅的NAND型闪存器件及其制造方法
- 专利标题: NAND-type flash memory device with high voltage PMOS and embedded poly and methods of fabricating the same
- 专利标题(中): 具有高压PMOS和嵌入式多晶硅的NAND型闪存器件及其制造方法
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申请号: US11606535申请日: 2006-11-30
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公开(公告)号: US20070133289A1公开(公告)日: 2007-06-14
- 发明人: Han-Rei Ma , Fu-Chang Hsu , Peter Lee , Xiang Hong
- 申请人: Han-Rei Ma , Fu-Chang Hsu , Peter Lee , Xiang Hong
- 专利权人: Aplus Flash Technology, Inc.
- 当前专利权人: Aplus Flash Technology, Inc.
- 主分类号: G11C16/04
- IPC分类号: G11C16/04
摘要:
The device of the invention includes a plurality of isolation layers formed at predetermined regions of a semiconductor substrate and running parallel with each other. The devices of the present invention also include a high voltage PMOS placed on top of a deep N-well and NMOS placed above a triple P-well inside the deep N-well in the peripheral area to pass both positive and negative high voltage of around +20V and −20V to the cell area. In one embodiment, the cell array, source lines and bit lines are all placed on top of the P-substrate without a deep N-well or Triple P-well. In other embodiments, the cell array, source lines and bit lines are placed on top of the deep N-well and triple P-well.
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