Invention Application
US20070141768A1 Method of laser annealing using linear beam having quasi-trapezoidal energy profile for increased depth of focus
失效
使用具有准梯形能量分布的线性光束进行激光退火的方法，以增加焦深
- Patent Title: Method of laser annealing using linear beam having quasi-trapezoidal energy profile for increased depth of focus
- Patent Title (中): 使用具有准梯形能量分布的线性光束进行激光退火的方法，以增加焦深
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Application No.: US11672984Application Date: 2007-02-09
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Publication No.: US20070141768A1Publication Date: 2007-06-21
- Inventor: Shunpei Yamazaki , Naoto Kusumoto , Koichiro Tanaka
- Applicant: Shunpei Yamazaki , Naoto Kusumoto , Koichiro Tanaka
- Applicant Address: JP Kanagawa-ken 243-0036
- Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee Address: JP Kanagawa-ken 243-0036
- Priority: JP07-209255 19950725; JP07-219557 19950804; JP07-243761 19950829
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L21/00
Abstract:
A linear pulse laser beam to be applied to an illumination surface is so formed as to have, at the focus, an energy profile in the width direction which satisfies inequalities 0.5L1≦L2≦L1 and 0.5L1≦L3≦L1 where assuming that a maximum energy is 1, L1 is a beam width of two points having an energy of 0.95 and L1 +L2 +L3 is a beam width of two points having an energy of 0.70, L2 and L3 occupying two peripheral portions of the beam width. According to another aspect of the invention, a compound-eye-like fly-eye lens for expanding a pulse laser beam in a sectional manner is provided upstream of a cylindrical lens for converging the laser beam into a linear beam.
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