发明申请
- 专利标题: Sputter apparatus with a pipe cathode and method for operating this sputter apparatus
- 专利标题(中): 具有管阴极的溅射装置和操作该溅射装置的方法
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申请号: US11498940申请日: 2006-08-03
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公开(公告)号: US20070144891A1公开(公告)日: 2007-06-28
- 发明人: Jurgen Henrich , Andreas Sauer , Andreas Geiss , Felix Brinckmann
- 申请人: Jurgen Henrich , Andreas Sauer , Andreas Geiss , Felix Brinckmann
- 优先权: EP05028124.5 20051222
- 主分类号: C23C14/00
- IPC分类号: C23C14/00
摘要:
A sputter apparatus with a pipe cathode is arranged such that the supply of power, cooling fluid and other media to the pipe cathode takes place via flexible lines or tubes which can be wound about a receptor. If the pipe cathode completes a pendulum movement, the lines and/or tubes are wound onto the receptor or wound from it. The pendulum movement of the pipe cathode is preferably such that the pipe cathode is rotated by a certain first angle in a first direction and subsequently by a certain second angle in a second direction, the second angle differing from the first angle. Methods for operating the sputter apparatus are also disclosed.