公开(公告)号：US20070144891A1

公开(公告)日：2007-06-28

申请号：US11498940

申请日：2006-08-03

申请人： Jurgen Henrich ,  Andreas Sauer ,  Andreas Geiss ,  Felix Brinckmann

发明人： Jurgen Henrich ,  Andreas Sauer ,  Andreas Geiss ,  Felix Brinckmann

IPC分类号： C23C14/00

CPC分类号： C23C14/3407 ,  H01J37/32568 ,  H01J37/32724 ,  H01J37/3402 ,  H01J37/3423

摘要： A sputter apparatus with a pipe cathode is arranged such that the supply of power, cooling fluid and other media to the pipe cathode takes place via flexible lines or tubes which can be wound about a receptor. If the pipe cathode completes a pendulum movement, the lines and/or tubes are wound onto the receptor or wound from it. The pendulum movement of the pipe cathode is preferably such that the pipe cathode is rotated by a certain first angle in a first direction and subsequently by a certain second angle in a second direction, the second angle differing from the first angle. Methods for operating the sputter apparatus are also disclosed.

摘要翻译： 具有管阴极的溅射装置被布置成使得向管阴极供应动力，冷却流体和其它介质通过能够缠绕在受体上的柔性管线或管发生。 如果管阴极完成摆动运动，则管线和/或管被卷绕到受体上或从其上缠绕。 管状阴极的摆动运动优选地使得管阴极在第一方向上旋转一定的第一角度，并且随后在第二方向上旋转一定的第二角度，第二角度与第一角度不同。 还公开了用于操作溅射装置的方法。

公开(公告)号：US07842167B2

公开(公告)日：2010-11-30

申请号：US11498940

申请日：2006-08-03

申请人： Jurgen Henrich ,  Andreas Sauer ,  Andreas Geiss ,  Felix Brinckmann

发明人： Jurgen Henrich ,  Andreas Sauer ,  Andreas Geiss ,  Felix Brinckmann

IPC分类号： C23C14/00

CPC分类号： C23C14/3407 ,  H01J37/32568 ,  H01J37/32724 ,  H01J37/3402 ,  H01J37/3423

摘要： A sputter apparatus with a pipe cathode is arranged such that the supply of power, cooling fluid and other media to the pipe cathode takes place via flexible lines or tubes which can be wound about a receptor. If the pipe cathode completes a pendulum movement, the lines and/or tubes are wound onto the receptor or wound from it. The pendulum movement of the pipe cathode is preferably such that the pipe cathode is rotated by a certain first angle in a first direction and subsequently by a certain second angle in a second direction, the second angle differing from the first angle. Methods for operating the sputter apparatus are also disclosed.

摘要翻译： 具有管阴极的溅射装置被布置成使得向管阴极供应动力，冷却流体和其它介质通过能够缠绕在受体上的柔性管线或管发生。 如果管阴极完成摆动运动，则管线和/或管被卷绕到受体上或从其上缠绕。 管状阴极的摆动运动优选地使得管阴极在第一方向上旋转一定的第一角度，并且随后在第二方向上旋转一定的第二角度，第二角度与第一角度不同。 还公开了用于操作溅射装置的方法。