发明申请
US20070148456A1 METAL WIRING, METHOD OF FORMING THE METAL WIRING, DISPLAY SUBSTRATE HAVING THE METAL WIRING AND METHOD OF MANUFACTURING THE DISPLAY SUBSTRATE
失效
金属接线,形成金属接线的方法,具有金属接线的显示基板和制造显示基板的方法
- 专利标题: METAL WIRING, METHOD OF FORMING THE METAL WIRING, DISPLAY SUBSTRATE HAVING THE METAL WIRING AND METHOD OF MANUFACTURING THE DISPLAY SUBSTRATE
- 专利标题(中): 金属接线,形成金属接线的方法,具有金属接线的显示基板和制造显示基板的方法
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申请号: US11609145申请日: 2006-12-11
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公开(公告)号: US20070148456A1公开(公告)日: 2007-06-28
- 发明人: Seung-Hwan Shim , Ho-Min Kang , Hoon-Kee Min , Sung-Su Hong , Sun Park , Seong-Kweon Heo
- 申请人: Seung-Hwan Shim , Ho-Min Kang , Hoon-Kee Min , Sung-Su Hong , Sun Park , Seong-Kweon Heo
- 优先权: KR2005-125219 20051219
- 主分类号: D02G3/00
- IPC分类号: D02G3/00
摘要:
In a metal wiring, a method of forming the metal wiring, a display substrate having the metal wiring and a method of manufacturing the display substrate, the metal wiring includes a metal film and a first amorphous carbon film. The metal film is formed on a base substrate using a copper-containing material, and the first amorphous carbon film is formed beneath the metal film. A process for forming the metal wiring including the amorphous carbon film may be greatly simplified, and generation of defects in the metal wiring may be prevented or reduced.
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