发明申请
US20070148456A1 METAL WIRING, METHOD OF FORMING THE METAL WIRING, DISPLAY SUBSTRATE HAVING THE METAL WIRING AND METHOD OF MANUFACTURING THE DISPLAY SUBSTRATE 失效
金属接线,形成金属接线的方法,具有金属接线的显示基板和制造显示基板的方法

METAL WIRING, METHOD OF FORMING THE METAL WIRING, DISPLAY SUBSTRATE HAVING THE METAL WIRING AND METHOD OF MANUFACTURING THE DISPLAY SUBSTRATE
摘要:
In a metal wiring, a method of forming the metal wiring, a display substrate having the metal wiring and a method of manufacturing the display substrate, the metal wiring includes a metal film and a first amorphous carbon film. The metal film is formed on a base substrate using a copper-containing material, and the first amorphous carbon film is formed beneath the metal film. A process for forming the metal wiring including the amorphous carbon film may be greatly simplified, and generation of defects in the metal wiring may be prevented or reduced.
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