发明申请
US20070164306A1 Group III nitride semiconductor crystal and method of its manufacture, group III nitride semiconductor device and method of its manufacture, and light-emitting appliance
有权
III族氮化物半导体晶体及其制造方法,III族氮化物半导体器件及其制造方法以及发光器具
- 专利标题: Group III nitride semiconductor crystal and method of its manufacture, group III nitride semiconductor device and method of its manufacture, and light-emitting appliance
- 专利标题(中): III族氮化物半导体晶体及其制造方法,III族氮化物半导体器件及其制造方法以及发光器具
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申请号: US10598934申请日: 2005-05-13
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公开(公告)号: US20070164306A1公开(公告)日: 2007-07-19
- 发明人: Seiji Nakahata , Hideaki Nakahata , Koji Uematsu , Makoto Kiyama , Youichi Nagai , Takao Nakamura
- 申请人: Seiji Nakahata , Hideaki Nakahata , Koji Uematsu , Makoto Kiyama , Youichi Nagai , Takao Nakamura
- 申请人地址: JP Osaka
- 专利权人: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- 当前专利权人: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- 当前专利权人地址: JP Osaka
- 优先权: JPJP2004147914 20040518; JP2005-117967 20050415
- 国际申请: PCT/JP05/08745 WO 20050513
- 主分类号: H01L33/00
- IPC分类号: H01L33/00 ; H01L21/00
摘要:
The invention provides Group III nitride semiconductor crystals of a size appropriate for semiconductor devices and methods for manufacturing the same, Group III nitride semiconductor devices and methods for manufacturing the same, and light-emitting appliances. A method of manufacturing a Group III nitride semiconductor crystal includes a process of growing at least one Group III nitride semiconductor crystal substrate on a starting substrate, a process of growing at least one Group III nitride semiconductor crystal layer on the Group III nitride semiconductor crystal substrate, and a process of separating a Group III nitride semiconductor crystal, constituted by the Group III nitride semiconductor crystal substrate and the Group III nitride semiconductor crystal layer, from the starting substrate, and is characterized in that the Group III nitride semiconductor crystal is 10 μm or more but 600 μm or less in thickness, and is 0.2 mm or more but 50 mm or less in width.
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