发明申请
US20070188729A1 Projection Lens for a Microlithographic Projection Exposure Apparatus
审中-公开
用于微光刻投影曝光装置的投影透镜
- 专利标题: Projection Lens for a Microlithographic Projection Exposure Apparatus
- 专利标题(中): 用于微光刻投影曝光装置的投影透镜
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申请号: US11738935申请日: 2007-04-23
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公开(公告)号: US20070188729A1公开(公告)日: 2007-08-16
- 发明人: Hans-Jurgen Mann , Wolfgang Singer
- 申请人: Hans-Jurgen Mann , Wolfgang Singer
- 申请人地址: DE Oberkochen
- 专利权人: Carl-Zeiss SMT AG
- 当前专利权人: Carl-Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 优先权: DEDE10254310.0 20021121
- 主分类号: G03B27/54
- IPC分类号: G03B27/54
摘要:
A projection lens for a EUV microlithographic projection exposure apparatus comprises a diaphragm (BL) which is arranged at a distance (D) in front of a mirror (S2) of the lens. The diaphragm (BL) has a non-round aperture with an edge contour that may be configured such two rays of a light bundle disposed symmetrically with respect to a chief ray are treated equally, i.e. either both rays pass through the diaphragm aperture or both are blocked by the diaphragm.
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