发明申请
US20070269986A1 METHOD, APPARATUS AND SYSTEM FOR USE IN PROCESSING WAFERS 有权
用于处理波形的方法,装置和系统

METHOD, APPARATUS AND SYSTEM FOR USE IN PROCESSING WAFERS
摘要:
The present embodiment provides for methods and systems for use in processing objects such as wafers, including polishing and/or grinding wafers. Some embodiments provide systems that include a front-end module and a processing module. The front end module couples with a storage device that stores objects for processing. The front-end module can comprise a single robot, a transfer station, and a plurality of end effectors. The processing module is coupled with the front-end module such that the single robot delivers objects from the storage device to the processing module. The processing module comprising a rotating table, and a spindle with a carrier configured to retrieve the delivered object and process the object on the rotating table.
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