发明申请
- 专利标题： PROBER FOR ELECTRONIC DEVICE TESTING ON LARGE AREA SUBSTRATES
- 专利标题（中）： 电子设备测试大面积基板的探测器
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申请号： US11746530申请日： 2007-05-09
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公开(公告)号： US20070296426A1公开(公告)日： 2007-12-27
- 发明人: SRIRAM KRISHNASWAMI , Matthias Brunner , William Beaton , Yong Liu , Benjamin Johnston , Hung Nguyen , Ludwig Ledl , Ralf Schmid
- 申请人： SRIRAM KRISHNASWAMI , Matthias Brunner , William Beaton , Yong Liu , Benjamin Johnston , Hung Nguyen , Ludwig Ledl , Ralf Schmid
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 主分类号： G01R31/02
- IPC分类号： G01R31/02
摘要：
An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays on the large area substrate. The apparatus includes a prober assembly that is movable relative to the large area substrate and/or the contact points, and may be configured to test various patterns of displays and contact points on various large area substrates. The prober assembly is also configured to test fractional sections of the large area substrate positioned on a testing table, and the prober assembly may be configured for different display and contact point patterns without removing the prober assembly from the testing table.
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