DYNAMIC SCRIBE ALIGNMENT FOR LASER SCRIBING, WELDING OR ANY PATTERNING SYSTEM
    1.
    发明申请
    DYNAMIC SCRIBE ALIGNMENT FOR LASER SCRIBING, WELDING OR ANY PATTERNING SYSTEM 审中-公开
    用于激光切割,焊接或任何绘图系统的动态筛选对准

    公开(公告)号:US20090321399A1

    公开(公告)日:2009-12-31

    申请号:US12422208

    申请日:2009-04-10

    IPC分类号: B23K26/38

    摘要: Methods and systems for improving the alignment between a previously formed feature and a subsequently formed feature are provided. An exemplary method can include laser scribing a workpiece (104, 550) having a previously formed first feature. The exemplary method includes imaging the workpiece (104, 550) with an imaging device (320, 420, 554, 640) so as to capture a plurality of positions of the first feature on the workpiece (104, 550) relative to the laser-scribing device (100). The exemplary method further includes using the captured positions to align output from the laser-scribing device (100) in order to form a second feature on the workpiece (104, 550) at a controlled distance from the first feature.

    摘要翻译: 提供了用于改善先前形成的特征与随后形成的特征之间的对准的方法和系统。 示例性的方法可以包括激光划刻具有先前形成的第一特征的工件(104,550)。 该示例性方法包括用成像装置(320,420,554,640)对工件(104,550)进行成像,以便相对于激光打印机捕获工件(104,550)上的第一特征的多个位置, 划线装置(100)。 该示例性方法还包括使用所捕获的位置来对齐来自激光划线装置(100)的输出,以便在距离第一特征的受控距离处在工件(104,550)上形成第二特征。

    Mini-prober for TFT-LCD testing
    4.
    发明授权
    Mini-prober for TFT-LCD testing 有权
    微型探针用于TFT-LCD测试

    公开(公告)号:US07602199B2

    公开(公告)日:2009-10-13

    申请号:US11746515

    申请日:2007-05-09

    CPC分类号: G01R31/2808 G09G3/006

    摘要: An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.

    摘要翻译: 描述了用于测试大面积基板的装置和方法。 大面积基板包括电连接到显示器的显示器和接触点的图案。 该装置包括可相对于大面积基板移动的探测器组件,并且可以被配置为测试各种显示和接触点的图案。 探测器组件还被配置成测试大面积衬底的分数段。 该装置还包括被配置为在内部容积内存储至少两个探测器组件的测试室。

    Prober for electronic device testing on large area substrates
    5.
    发明授权
    Prober for electronic device testing on large area substrates 有权
    用于在大面积基板上进行电子设备测试的探针

    公开(公告)号:US07786742B2

    公开(公告)日:2010-08-31

    申请号:US11746530

    申请日:2007-05-09

    IPC分类号: G01R31/02

    摘要: An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays on the large area substrate. The apparatus includes a prober assembly that is movable relative to the large area substrate and/or the contact points, and may be configured to test various patterns of displays and contact points on various large area substrates. The prober assembly is also configured to test fractional sections of the large area substrate positioned on a testing table, and the prober assembly may be configured for different display and contact point patterns without removing the prober assembly from the testing table.

    摘要翻译: 描述了用于测试大面积基板的装置和方法。 大面积基板包括电耦合到大面积基板上的显示器的显示器图案和接触点。 该装置包括可相对于大面积基板和/或接触点移动的探测器组件,并且可以被配置为测试各种大面积基板上的各种显示图案和接触点。 探测器组件还被配置为测试位于测试台上的大面积衬底的小数部分,并且探针组件可以被配置为用于不同的显示和接触点图案而不从测试台移除探测器组件。

    SYSTEM AND METHOD FOR TRANSFERRING A SUBSTRATE INTO AND OUT OF A REDUCED VOLUME CHAMBER ACCOMMODATING MULTIPLE SUBSTRATES
    10.
    发明申请
    SYSTEM AND METHOD FOR TRANSFERRING A SUBSTRATE INTO AND OUT OF A REDUCED VOLUME CHAMBER ACCOMMODATING MULTIPLE SUBSTRATES 审中-公开
    将基板输入和输出到减少容积的多个基板的系统和方法

    公开(公告)号:US20080251019A1

    公开(公告)日:2008-10-16

    申请号:US11871510

    申请日:2007-10-12

    IPC分类号: B05C11/00 H01L21/02

    摘要: The present invention comprises a system and method for transferring a substrate into and out of a chamber configured to accommodate multiple substrates. In one embodiment, the system comprises a chamber housing that includes a first substrate support tray and a second substrate support tray independently movable along a vertical axis, and a substrate conveyor movable into and out of the chamber housing. The first substrate support tray and the second substrate support tray are movable to a position where a portion of the second substrate support tray is received in the first substrate support tray.

    摘要翻译: 本发明包括用于将衬底转入和移出被配置为容纳多个衬底的室的系统和方法。 在一个实施例中,系统包括腔室壳体,其包括第一衬底支撑托盘和可沿着垂直轴线独立移动的第二衬底支撑托盘以及可移入和移出腔室壳体的衬底输送器。 第一基板支撑托盘和第二基板支撑托盘可移动到第二基板支撑托盘的一部分被容纳在第一基板支撑托盘中的位置。