Invention Application
- Patent Title: SOI devices and methods for fabricating the same
- Patent Title (中): SOI器件及其制造方法
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Application No.: US11477953Application Date: 2006-06-30
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Publication No.: US20080001188A1Publication Date: 2008-01-03
- Inventor: Chung-Long Cheng , Kong-Beng Thei , Sheng-Chen Chung , Tzung-Chi Lee , Harry Chuang
- Applicant: Chung-Long Cheng , Kong-Beng Thei , Sheng-Chen Chung , Tzung-Chi Lee , Harry Chuang
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L21/8234

Abstract:
Silicon on insulator (SOI) devices and methods for fabricating the same are provided. An exemplary embodiment of a SOI device comprises a substrate. A first insulating layer is formed over the substrate. A plurality of semiconductor islands is formed over the first insulating layer, wherein the semiconductor islands are isolated from each other. A second insulating layer is formed over the first insulating layer, protruding over the semiconductor islands and surrounding thereof. At least one recess is formed in a portion of the second insulating layer adjacent to a pair of the semiconductor islands. A first dielectric layer is formed on a portion of each of the semiconductor islands. A conductive layer is formed over the first dielectric layer and over the second insulating layer exposed by the recess. A pair of source/drain regions is oppositely formed in portions of each of the semiconductor islands not covered by the first dielectric layer and the conductive layer.
Public/Granted literature
- US07550795B2 SOI devices and methods for fabricating the same Public/Granted day:2009-06-23
Information query
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