Invention Application
US20080003157A1 METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
审中-公开
使用CDO室进行PFC排放的方法和装置
- Patent Title: METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
- Patent Title (中): 使用CDO室进行PFC排放的方法和装置
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Application No.: US11673404Application Date: 2007-02-09
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Publication No.: US20080003157A1Publication Date: 2008-01-03
- Inventor: Sebastien Raoux , Kuo-Chen Lin , Robbert Vermeulen , Daniel Clark , Stephen Tsu , Mehran Moalem , Allen Fox , Monique McIntosh , Joshua Putz , Eric Rieske , Poh Lee
- Applicant: Sebastien Raoux , Kuo-Chen Lin , Robbert Vermeulen , Daniel Clark , Stephen Tsu , Mehran Moalem , Allen Fox , Monique McIntosh , Joshua Putz , Eric Rieske , Poh Lee
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Main IPC: B01D53/74
- IPC: B01D53/74 ; C01B21/00 ; C01B7/20 ; C07C1/00

Abstract:
In at least one aspect, a controlled decomposition oxidation (CDO) system is provided for abating perfluorocarbons (PFCs) that includes (1) an upstream portion including a first conduit adapted to convey a gaseous waste stream; (2) a thermal reaction chamber having an inlet coupled to the first conduit, a catalyst bed adapted to abate PFCs, and an outlet; and (3) a downstream portion including a second conduit having a first end coupled to the outlet of the thermal reaction chamber and having a portion, downstream from the first end, positioned proximate to the first conduit. The second conduit is adapted to convey a gaseous waste stream heated within the thermal reaction chamber to enable a transfer of heat energy from the second conduit to the first conduit so as to pre-heat the gaseous waste stream in the first conduit. Numerous other aspects are provided.
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