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    PORTABLE FLUORINE GENERATOR FOR ON-SITE CALIBRATION
    2.
    发明申请
    PORTABLE FLUORINE GENERATOR FOR ON-SITE CALIBRATION 有权

    公开(公告)号：US20220332575A1

    公开(公告)日：2022-10-20

    申请号：US17230514

    申请日：2021-04-14

    申请人： Applied Materials, Inc.

    发明人： Joseph A. VAN GOMPEL

    IPC分类号： C01B7/20 ,  B01J19/14 ,  B01J19/08 ,  C01B21/04

    摘要： A method and apparatus for generation of fluorine gas (F2) in situ at the point of use is provided. The portable fluorine generator includes a dilution system disposed within a housing and operable to mix a feed gas comprising fluorine with an inert gas. The portable fluorine generator further includes a plasma reactor unit disposed within the housing and operable to separate fluorine (F2) from the feed gas comprising fluorine.

    Fluorine gas generator
    3.
    发明授权
    Fluorine gas generator 有权
    氟气发生器

    公开(公告)号：US09194050B2

    公开(公告)日：2015-11-24

    申请号：US14112850

    申请日：2012-05-17

    申请人： Takuya Kita ,  Tatsuo Miyazaki ,  Akifumi Yao

    发明人： Takuya Kita ,  Tatsuo Miyazaki ,  Akifumi Yao

    IPC分类号： C25B1/24 ,  C25B1/00 ,  C25B3/08 ,  C25B9/00 ,  C25C3/08 ,  C25B15/08 ,  C01B7/20 ,  B01D53/68 ,  B01D53/04

    CPC分类号： C25B9/00 ,  B01D53/0407 ,  B01D53/685 ,  B01D2253/112 ,  B01D2256/26 ,  B01D2257/2047 ,  C01B7/20 ,  C25B1/245 ,  C25B15/08

    摘要： A fluorine gas generating device 100 which is characterized by having a cylindrical member 31a for circulating therein the main-product gas, a gas feed port 51a for introducing the main-product gas into the cylindrical member 31a, a gas discharge port 52a for discharging the main-product gas from the cylindrical member 31a, an adsorbent holding member 201 arranged in the cylindrical member 31a to form a space to provide a channel for the main-product gas circulated in the cylindrical member 31a, a stirring blade 202 for stirring the main-product gas that is introduced through the gas feed port 51a, and a gas flow guiding cylinder 203 for circulating or diffusing the main-product gas in the space within the cylindrical member 31a.

    摘要翻译： 一种氟气产生装置100，其特征在于具有用于在其中循环主要产物气体的圆柱形构件31a，用于将主产物气体引入圆筒构件31a的气体供给口51a，用于排出主气体的气体排出口52a 来自圆柱形部件31a的主要产物气体，布置在圆柱形部件31a中的吸附剂保持部件201，以形成用于为在圆柱形部件31a中循环的主要产物气体提供通道的空间;搅拌叶片202，用于搅拌主体 - 通过气体供给口51a引入的副产物气体和用于使主体气体在筒状部件31a内的空间内循环或扩散的气流引导筒203。

    Method for the purification of fluorine
    4.
    发明授权
    Method for the purification of fluorine 有权
    纯化氟的方法

    公开(公告)号：US08821821B2

    公开(公告)日：2014-09-02

    申请号：US13814033

    申请日：2011-08-03

    申请人： Oliviero Diana ,  Peter M. Predikant ,  Philippe Morelle ,  Maurizio Paganin ,  Christoph Sommer

    发明人： Oliviero Diana ,  Peter M. Predikant ,  Philippe Morelle ,  Maurizio Paganin ,  Christoph Sommer

    IPC分类号： B01D53/56 ,  C01B7/00 ,  C01B7/19 ,  H01L21/306 ,  C01B7/20 ,  H01L21/02

    CPC分类号： C01B7/20 ,  C01B7/197 ,  H01L21/02057 ,  H01L21/30604

    摘要： Elemental fluorine is often manufactured electrochemically from a solution of KF in hydrogen fluoride and contains varying amounts of entrained electrolyte salt in solid form as impurity. The invention concerns a process for the purification of such impure elemental fluorine by contact with liquid hydrogen fluoride, e.g., in a jet gas scrubber or by bubbling the raw fluorine through liquid hydrogen fluoride. After this purification step, any entrained hydrogen fluoride is removed by adsorption, condensing it out or both. After passing through a filter with very small pores, the purified fluorine is especially suited for the semiconductor industry as etching gas or as chamber cleaning gas in the manufacture of semiconductors, TFTs and solar cells, or for the manufacture of micro-electromechanical systems (“MEMS”).

    摘要翻译： 元素氟通常由KF在氟化氢中的溶液电化学制造，并且含有不同量的作为杂质的固体形式的夹带电解质盐。 本发明涉及通过与液体氟化氢接触来净化这种不纯的元素氟的方法，例如在喷气气体洗涤器中或通过使氟氟化钠通过液体氟化氢鼓泡。 在该纯化步骤之后，通过吸附除去夹带的氟化氢，将其冷凝出来或者两者。 在通过具有非常小的孔的过滤器之后，纯化的氟特别适合作为半导体，TFT和太阳能电池的制造中的蚀刻气体或室清洁气体的半导体工业，或者用于制造微机电系统（“ MEMS“）。

    Method of plasma etching and plasma chamber cleaning using F2 and COF2
    5.
    发明申请
    Method of plasma etching and plasma chamber cleaning using F2 and COF2 审中-公开
    使用F2和COF2等离子体蚀刻和等离子体室清洗的方法

    公开(公告)号：US20120214312A1

    公开(公告)日：2012-08-23

    申请号：US13504099

    申请日：2010-10-28

    申请人： Marcello Riva

    发明人： Marcello Riva

    IPC分类号： H01L21/3065 ,  C01B7/20 ,  C01B31/00 ,  B08B9/08

    CPC分类号： C23C16/4405 ,  C23F4/00 ,  C23G5/00

    摘要： For the plasma assisted manufacture of semiconductors, photovoltaic cells, thin film transistor liquid crystal displays and micro-electromechanical systems, and for chamber cleaning, F2 or COF2 is applied as etchant. It was found that a plasma emitter providing microwaves with a frequency of equal to or greater than 15 MHz provides plasma very effectively.

    摘要翻译： 对于等离子体辅助制造半导体，光伏电池，薄膜晶体管液晶显示器和微机电系统以及室清洁，F2或COF2作为蚀刻剂。 发现提供频率等于或大于15MHz的微波的等离子体发射器非常有效地提供等离子体。

    Method for preparing manganese tetrafluoride
    6.
    发明申请
    Method for preparing manganese tetrafluoride 审中-公开
    四氟化锰的制备方法

    公开(公告)号：US20110110844A1

    公开(公告)日：2011-05-12

    申请号：US12743986

    申请日：2008-12-09

    申请人： Ulrich Seseke-Koyro ,  Placido Garcia-Juan ,  Stefan Palsherm ,  Alf Schulz

    发明人： Ulrich Seseke-Koyro ,  Placido Garcia-Juan ,  Stefan Palsherm ,  Alf Schulz

    IPC分类号： C01G45/06 ,  C01B7/20

    CPC分类号： C01G45/06 ,  C01B7/20

    摘要： Manganese tetrafluoride is prepared by a reaction between manganese difluoride or manganese trifluoride particles and elemental fluorine. During the reaction, surfaces of the particles are rendered fresh, e.g. by mechanical impact on the particles. Thereby, also agglomeration, sintering or vitrification of the particles is prevented. The impact is not so intensive that the particles would be crushed.

    摘要翻译： 四氟化锰通过二氟化锰或三氟化锰颗粒与元素氟之间的反应制备。 在反应期间，颗粒的表面变得新鲜，例如 通过对颗粒的机械冲击。 因此，也防止了颗粒的附聚，烧结或玻璃化。 冲击力不会太大，颗粒会被粉碎。

    FLUORINE STORAGE MATERIAL
    7.
    发明申请
    FLUORINE STORAGE MATERIAL 有权
    氟储存材料

    公开(公告)号：US20090098040A1

    公开(公告)日：2009-04-16

    申请号：US12159943

    申请日：2006-12-26

    申请人： Hidekazu Touhara ,  Yoshio Nojima ,  Tomohiro Isogai

    发明人： Hidekazu Touhara ,  Yoshio Nojima ,  Tomohiro Isogai

    IPC分类号： C01B31/30 ,  C01B7/20

    CPC分类号： C01B7/20 ,  B01J20/20 ,  B01J20/205 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/18 ,  Y10S977/788

    摘要： There is provided a fluorine storage material comprising a novel fluorinated carbon nanohorn, which stores a large amount of fluorine per its unit mass, withstand repeated use for fluorine storage, and enables a high purity fluorine gas to be taken out by a safe and efficient method, and also there is provided a method of taking out a fluorine gas by applying heat to the fluorine storage material or placing the fluorine storage material in a pressure-reduced atmosphere.

    摘要翻译： 提供一种氟储存材料，其包含新颖的氟化碳纳米角，其每单位质量存储大量的氟，可以重复使用氟储存，并且可以通过安全有效的方法取出高纯度氟气 并且还提供了通过向氟存储材料施加热量或将氟储存材料放置在减压气氛中来取出氟气的方法。

    METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
    8.
    发明申请
    METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER 审中-公开
    使用CDO室进行PFC排放的方法和装置

    公开(公告)号：US20080003157A1

    公开(公告)日：2008-01-03

    申请号：US11673404

    申请日：2007-02-09

    申请人： Sebastien Raoux ,  Kuo-Chen Lin ,  Robbert Vermeulen ,  Daniel Clark ,  Stephen Tsu ,  Mehran Moalem ,  Allen Fox ,  Monique McIntosh ,  Joshua Putz ,  Eric Rieske ,  Poh Lee

    发明人： Sebastien Raoux ,  Kuo-Chen Lin ,  Robbert Vermeulen ,  Daniel Clark ,  Stephen Tsu ,  Mehran Moalem ,  Allen Fox ,  Monique McIntosh ,  Joshua Putz ,  Eric Rieske ,  Poh Lee

    IPC分类号： B01D53/74 ,  C01B21/00 ,  C01B7/20 ,  C07C1/00

    CPC分类号： B01D53/8662 ,  B01D2257/2066 ,  C01B7/20 ,  Y02C20/30 ,  Y02P20/154

    摘要： In at least one aspect, a controlled decomposition oxidation (CDO) system is provided for abating perfluorocarbons (PFCs) that includes (1) an upstream portion including a first conduit adapted to convey a gaseous waste stream; (2) a thermal reaction chamber having an inlet coupled to the first conduit, a catalyst bed adapted to abate PFCs, and an outlet; and (3) a downstream portion including a second conduit having a first end coupled to the outlet of the thermal reaction chamber and having a portion, downstream from the first end, positioned proximate to the first conduit. The second conduit is adapted to convey a gaseous waste stream heated within the thermal reaction chamber to enable a transfer of heat energy from the second conduit to the first conduit so as to pre-heat the gaseous waste stream in the first conduit. Numerous other aspects are provided.

    摘要翻译： 在至少一个方面，提供控制分解氧化（CDO）系统以减轻全氟化碳（PFCs），其包括（1）包括适于输送气态废物流的第一导管的上游部分; （2）具有连接到第一导管的入口的热反应室，适于消除PFC的催化剂床和出口; 和（3）包括第二导管的下游部分，第二导管具有联接到热反应室的出口的第一端，并且具有位于第一端的下游的部分，其位于第一导管附近。 第二导管适于传送在热反应室内加热的气态废物流，以便能够将热能从第二导管传递到第一导管，以便预热第一导管中的气体废物流。 提供了许多其他方面。