发明申请
US20080003158A1 METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
审中-公开
使用CDO室进行PFC排放的方法和装置
- 专利标题： METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
- 专利标题（中）： 使用CDO室进行PFC排放的方法和装置
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申请号： US11673542申请日： 2007-02-09
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公开(公告)号： US20080003158A1公开(公告)日： 2008-01-03
- 发明人: Sebastien Raoux , Kuo-Chen Lin , Robbert Vermeulen , Daniel Clark , Stephen Tsu , Mehran Moalem , Allen Fox , Monique McIntosh , Joshua Putz , Eric Rieske , Poh Lee
- 申请人： Sebastien Raoux , Kuo-Chen Lin , Robbert Vermeulen , Daniel Clark , Stephen Tsu , Mehran Moalem , Allen Fox , Monique McIntosh , Joshua Putz , Eric Rieske , Poh Lee
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 主分类号： C01B7/20
- IPC分类号： C01B7/20 ; C01B17/00 ; C07C1/00 ; C01B21/00
摘要：
In some aspects, a method is provided for abating perfluorocarbons (PFCs) in a gaseous waste abatement system having a pre-installed controlled decomposition oxidation (CDO) thermal reaction chamber. The method that includes (1) providing a catalyst bed within the CDO thermal reaction chamber; and (2) introducing a gaseous waste stream into the CDO thermal reaction chamber so as to expose the gaseous waste stream to the catalyst bed. Numerous other aspects are provided.